초록 ▼

A semiconductor transducer with a diaphragm is constructed utilizing a substrate wherein a first portion of that first face is etched to a planar level to achieve a second portion as a physical stop on this substrate, the physical stop having a planar stop face, a sloping sided cavity is etched into

A semiconductor transducer with a diaphragm is constructed utilizing a substrate wherein a first portion of that first face is etched to a planar level to achieve a second portion as a physical stop on this substrate, the physical stop having a planar stop face, a sloping sided cavity is etched into a semiconductor wafer from a first face thereof to form a deformable diaphragm in this semiconductor wafer. The semiconductor wafer is anodically bonded to the substrate planar level, with the physical stop located in the cavity and with the stop face acting to prohibit excess movement of the diaphragm. The foregoing abstract is merely a resume of one general application, is not a complete discussion of all principles of operation or applications, and is not to be construed as a limitation on the scope of the claimed subject matter.

대표청구항 ▼

A semiconductor transducer comprising, in combination: a semiconductor base having first and second planar parallel faces; a cavity formed in said base from said first face to form a deformable diaphragm unitary with said base; a substrate having a planar surface bonded to said first face of said ba

A semiconductor transducer comprising, in combination: a semiconductor base having first and second planar parallel faces; a cavity formed in said base from said first face to form a deformable diaphragm unitary with said base; a substrate having a planar surface bonded to said first face of said base; a physical stop and locator means integral with and carried by said substrate and positioned in said cavity; and said physical stop and locator means having a stop face substantially parallel to and positioned closely adjacent to said diaphragm to be contactable by said diaphragm upon excessive excursion to prevent rupture thereof, and having lateral sides cooperable with the side walls of said cavity for location within the cavity.