초록 ▼

A novel method and machine are provided for processing workpieces at one or more work-stations under vacuum conditions. The machine comprises means for receiving at atmospheric pressure an object to be processed, an inlet lock that is connected to a vacuum manifold, at least one processing station t

A novel method and machine are provided for processing workpieces at one or more work-stations under vacuum conditions. The machine comprises means for receiving at atmospheric pressure an object to be processed, an inlet lock that is connected to a vacuum manifold, at least one processing station that is at a pressure at least as low as 10-1 to 10-6 mm. Hg., means for conveying work-pieces to be processed into and through the input lock to said at least one processing station so that the pressure within the processing chamber is not adversely affected by introduction of workpieces thereto via the input lock, an output lock, and means for transferring workpieces from said at least one processing station into the output lock so that the pressure in said at least one processing station is not adversely affected by such transfer.

대표청구항 ▼

Method of processing compact disks comprising the following steps: (a) delivering a disk to a disk carrier disposed in a disk loading station, said disk carrier having a larger diameter than said disk and having a sealing element at its periphery; (b) transferring said disk carrier and disk to a mas

Method of processing compact disks comprising the following steps: (a) delivering a disk to a disk carrier disposed in a disk loading station, said disk carrier having a larger diameter than said disk and having a sealing element at its periphery; (b) transferring said disk carrier and disk to a mask-receiving station; (c) covering said disk with at least one mask component at said mask-receiving station; (d) transferring said disk carrier with the mask-covered disk to a first carrier-transfer station that comprises an elongated input chamber at a controlled reduced pressure; (e) shifting said disk carrier with the mask-covered disk along said input chamber to a second carrier-transfer station; (f) transferring said disk carrier with the mask-covered disk from said second carrier-transfer station to at least one disk-processing station; (g) treating said disk in at least one disk-processing station; (h) transferring said disk carrier with the treated mask-covered disk from said at least one disk-processing station to a third carrier-transfer station that comprises an elongated output chamber; (i) shifting said disk carrier with the treated mask-covered disk along said output chamber to a mask-removal station; (j) removing said at least one mask component from the treated mask-covered disk at said mask-removal station and transferring said at least one mask component to another disk supported by another disk carrier located at said mask-receiving station; (k) transferring said disk carrier with the treated mask-free disk from said mask-removal-station to a disk-unloading station; (l) removing said treated mask-free disk from said disk carrier at said disk-unloading station; (m) transferring the disk-free disk carrier from said disk-unloading station to said disk-loading station; and (n) repeating the foregoing steps commencing with delivery of a disk to the disk-free disk carrier at said disk-loading station.