초록 ▼

Improved handling of multi-wafer cassettes in automated wafer processing machines is accomplished by means of an improved cassette elevator. The design of the cassette elevator is such that the receiver/sender portion of the wafer processing machine can be easily configured to accommodate single or

Improved handling of multi-wafer cassettes in automated wafer processing machines is accomplished by means of an improved cassette elevator. The design of the cassette elevator is such that the receiver/sender portion of the wafer processing machine can be easily configured to accommodate single or multiple cassette elevators served by a single wafer loading spatula without increasing the width of the receiver/sender units. In addition, an automatic tilt feature of the cassette elevator substantially reduces the likelihood of wafer breakage during the cassette loading and unloading operation.

대표청구항 ▼

In a wafer processing machine, a cassette elevator comprising: a cassette platform adapted to carry a multi-wafer cassette; a carrier plate, said cassette platform being pivotally coupled to said carrier plate in a cantilever fashion; and drive means coupled to said carrier plate for vertically posi

In a wafer processing machine, a cassette elevator comprising: a cassette platform adapted to carry a multi-wafer cassette; a carrier plate, said cassette platform being pivotally coupled to said carrier plate in a cantilever fashion; and drive means coupled to said carrier plate for vertically positioning said carrier plate and cassette platform, said drive means being positioned to allow passage of a spatula under said cassette platform when said cassette platform is in a fully raised position.