$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Flow control manifold 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F16K-011/22
출원번호 US-0135939 (1987-12-21)
발명자 / 주소
  • Grant Robert W. (Excelsior MN) Jenson William M. (Excelsior MN)
출원인 / 주소
  • FSI International, Inc. (Chaska MN 02)
인용정보 피인용 횟수 : 28  인용 특허 : 6

초록

A fluid dispensing and metering unit is described for dispensing fluids into a system without the introduction of microcontaminants into the fluid flow. This unit includes a block with a fluid conducting duct axially extending from the block\s proximal face to the block\s distal face. In communicati

대표청구항

A fluid dispensing and metering unit for dispensing a desired fluid amount into a fluid conducting duct, comprising: (a) a block having a proximal and distal face, and a fluid conducting duct axially extending from said proximal face through said block to said distal face; (b) means in communication

이 특허에 인용된 특허 (6)

  1. Allibert Jean-Pierre (Chatenay Malabry FRX), Color-changing valve for an automatic painting machine.
  2. Baumann Hans D. (32 Pine St. Rye NH 03870), Control valve with integral streamlined seating means.
  3. Tchebinyayeff Michel R. (Domont FRX), Device for distributing paints, solvents, varnishes or the like.
  4. Bettini John E. (Elgin IL) Blucher William J. (Addison IL), Fastener with head cap having a concealed edge.
  5. Ochs Paul (2 Druid Hill Drive Parsippany NJ 07054), High temperature fluid pressure control valve.
  6. Williams Donald L. (Port Clinton OH), Rod operated valve.

이 특허를 인용한 특허 (28)

  1. Mohindra Raj ; Bhushan Abhay ; Bhushan Rajiv ; Puri Suraj ; Anderson ; Sr. John H. ; Nowell Jeffrey, Cleaning and drying photoresist coated wafers.
  2. Kingsford Kenji A. ; Chan Anthony K. T. ; Fregoso Mario ; Martinez David R., Compact valve with rolling diaphragm poppet.
  3. Ohmi Tadahiro,JPX ; Yamaji Michio,JPX ; Ikeda Nobukazu,JPX ; Morokoshi Hiroshi,JPX, Fluid control system and valve to be used therein.
  4. Raterman, John M.; Chastine, Christopher R., Intake portion of a liquid dispensing valve.
  5. Clark,Steven; Gould,Mark A.; Jones,Kenneth, Integral manifold for liquid material dispensing systems.
  6. Bhushan Rajiv ; Chang Ru ; Mohindra Raj ; Chiu Vincent ; Tran Dong T., Mandrel device and method for hard disks.
  7. Cline David J. ; Smith Steven ; Clark Timothy S., Method and apparatus for accurately dispensing liquids and solids.
  8. Cline David J. ; Smith Steven ; Clark Timothy S., Method and apparatus for accurately dispensing liquids and solids.
  9. Mohindra Raj ; Wong David C. ; Puri Suraj, Method and apparatus for cleaning wafers using multiple tanks.
  10. Bezema,Martin; Buerger,Ronald, Method and system for aligning components of a liquid dispensing system.
  11. Raterman, John M.; Chastine, Christopher R.; Chouinard, Alain; Craig, Greg A.; Pullagura, David; Tinaglia, Matthew R., Method and system for supporting and/or aligning components of a liquid dispensing system.
  12. Raterman, John M.; Chastine, Christopher R.; Chouinard, Alain; Craig, Greg A.; Pullagura, David; Tinaglia, Matthew R., Method and system for supporting and/or aligning components of a liquid dispensing system.
  13. Raterman,John M.; Chastine,Christopher R.; Chouinard,Alain; Craig,Greg A.; Pullagura,David; Tinaglia,Matthew R., Method and system for supporting and/or aligning components of a liquid dispensing system.
  14. Abe,Koichi, Method for manufacturing a multi-path joint.
  15. Abe,Koichi, Multi-path joint and manufacturing method thereof.
  16. Rodrigues,Jose, Pneumatically-controlled needle valve.
  17. Flatt Larry W. ; Quarles Robert W., Segmented stackable head design.
  18. Flatt Larry W. ; Quarles Robert W., Segmented stackable head design.
  19. Edwards Nicholas P. ; Summers Paul ; Lafayette Donald, Two stage variable flow valve assembly.
  20. Mohindra Raj ; Bhushan Abhay ; Bhushan Rajiv ; Puri Suraj ; Anderson ; Sr. John H. ; Nowell Jeffrey, Ultra-low particle disk cleaner.
  21. Mohindra Raj ; Bhushan Abhay ; Bhushan Rajiv ; Puri Suraj ; Anderson ; Sr. John H. ; Nowell Jeffrey, Ultra-low particle semiconductor cleaner.
  22. Mohindra Raj ; Bhushan Abhay ; Bhushan Rajiv ; Puri Suraj ; Anderson ; Sr. John H. ; Nowell Jeffrey, Ultra-low particle semiconductor cleaner.
  23. Mohindra Raj ; Bhushan Abhay ; Bhushan Rajiv ; Puri Suraj ; Anderson ; Sr. John H. ; Nowell Jeffrey, Ultra-low particle semiconductor cleaner.
  24. Mohindra Raj ; Bhushan Abhay ; Bhushan Rajiv ; Puri Suraj ; Anderson ; Sr. John H. ; Nowell Jeffrey, Ultra-low particle semiconductor cleaner.
  25. Raj Mohindra ; Abhay Bhushan ; Rajiv Bhushan ; Suraj Puri ; John H. Anderson Sr. ; Jeffrey Nowell, Ultra-low particle semiconductor cleaner.
  26. Raj Mohindra ; Abhay Bhushan ; Rajiv Bhushan ; Suraj Puri ; John H. Anderson, Sr. ; Jeffrey Nowell, Ultra-low particle semiconductor cleaner.
  27. Mohindra Raj ; Bhushan Abhay ; Bhushan Rajiv ; Puri Suraj ; Wong David, Ultra-low particle semiconductor cleaner using heated fluids.
  28. Arnold Don C. (Buffalo Grove IL) Semchuck Mario (Chatsworth CA), Water faucet poppet valve.
섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로