초록 ▼

A high-speed test system for semiconductor integrated circuits utilizes electro-optic sampling techniques to perform tests at data rates up to 1.2 Gb/s. The receiver portion of the tester has a 4.5 GHz bandwidth and can perform ECL level functional test with one sampling pulse per vector. A device u

A high-speed test system for semiconductor integrated circuits utilizes electro-optic sampling techniques to perform tests at data rates up to 1.2 Gb/s. The receiver portion of the tester has a 4.5 GHz bandwidth and can perform ECL level functional test with one sampling pulse per vector. A device under test is positioned in a test head with an electro-optic birefringent crystal sensor positioned below the device under test to minimize signal path length. A system control unit includes a Nd: YAG modelocked laser which generates optical pulses, and optical transmission means directs the optical pulses to an array of reflective contacts on the sensor. The sensor functions as a Pockels cell with the electric field in the crystal sensor due to voltages on the array of contacts changing the transmission of polarized light through the crystal. Reflected pulses are received and converted to electrical signals indicative of the voltages on the array of contacts on the electro-optic sensor.

대표청구항 ▼

A high-speed test system for semiconductor integrated circuits comprising an adapter board for receiving a circuit for test, a plurality of driver circuits positioned around said adapter board, an electro-optic sensor positioned below said adapter board, connector means connecting said plurality of

A high-speed test system for semiconductor integrated circuits comprising an adapter board for receiving a circuit for test, a plurality of driver circuits positioned around said adapter board, an electro-optic sensor positioned below said adapter board, connector means connecting said plurality of driver circuits to contacts of a circuit undergoing test and for connecting contacts of a circuit undergoing test to said electro-optic sensor, electro-optical voltage measuring means, laser means for generating light sampling pulses, optical means for directing said light sampling pulses to said electro-optic sensor and for directing said light sampling pulses from said electro-optic sensor to said electro-optic voltage measuring means, and control means for controlling operation of said driver circuits, said electro-optical voltage measuring means and said optical means, said control means including a test signal pattern generator, a system time base, and data acquisition means.