초록 ▼

An enriching device consisting of a container which comprises a removable tightly fitting metal body the sparingly volatile material being present in a coiled groove. During operation of this device transverse flows and shortcuts, respectively, of the carrier gas flow occur. To assure that the carri

An enriching device consisting of a container which comprises a removable tightly fitting metal body the sparingly volatile material being present in a coiled groove. During operation of this device transverse flows and shortcuts, respectively, of the carrier gas flow occur. To assure that the carrier gas flows through the material without having an escape possibility, the groove (5) is made either in an outer wall of the metal body (8) or in the bottom (4) of the container (1), and the parts (6) present between the individual turns of the groove have a cutting edge, i.e. a cross-sectional profile in the form of a wedge, the tip of which is in contact either with the smooth inner wall of the container (1) or with the smooth lower side of the metal body (8). The device is suitable for adjusting a defined mass flow of sparingly volatile materials which are used as starting compounds for chemical deposition from the gaseous phase.

대표청구항 ▼

A device for enriching a carrier gas with the vapor of a volatile material composed of relatively small solid particles comprising: a container having an outer wall and at least one side wall; a tightly fitting metal body insertable within said container, said metal body having a surface for engagem

A device for enriching a carrier gas with the vapor of a volatile material composed of relatively small solid particles comprising: a container having an outer wall and at least one side wall; a tightly fitting metal body insertable within said container, said metal body having a surface for engagement with the outer wall of said container; at least one of said outer wall of said container and said engagement surface of said metal body having at least one spiral groove forming a heatable inner space for holding the volatile material through which the carrier gas passes and flows, said grooves having a wedge-like cross section with the tips of the wedges disposed in contact with the other of said outer wall of said container and said engagement surface of said metal body to separate the individual turns of the groove from each other; an inlet duct leading to one end of said spiral groove for entry of the carrier gas; and an outlet duct disposed at the other end of said spiral groove for outletting said enriched carrier gas.