초록 ▼

A wafer transport system includes a mobile frame, a wafer cassette conveyor, a wafer support table, and a wafer transfer assembly. The wafer cassette conveyor carries a plurality of wafer cassettes and presents them successively to a transfer location. The wafer transport assembly, including a robot

A wafer transport system includes a mobile frame, a wafer cassette conveyor, a wafer support table, and a wafer transfer assembly. The wafer cassette conveyor carries a plurality of wafer cassettes and presents them successively to a transfer location. The wafer transport assembly, including a robotic arm and a vacuum pickup element, is then able to transport individual wafers from the cassettes to the support table. By rotating the support table, a plurality of wafers can be placed in a desired order. The wafer support table may then be moved to a location proximate a processing chamber, such as a chemical vapor deposition reactor, and processed and unprocessed wafers efficiently exchanged by the transport assembly.

대표청구항 ▼

A system for transferring semiconductor wafers between a processing vessel and wafer cassettes, said system comprising: a frame capable of being positioned proximate the processing vessel; means mounted on the frame for transporting a plurality of wafer cassettes along a closed path; a support surfa

A system for transferring semiconductor wafers between a processing vessel and wafer cassettes, said system comprising: a frame capable of being positioned proximate the processing vessel; means mounted on the frame for transporting a plurality of wafer cassettes along a closed path; a support surface rotatably mounted on the frame; means on the support surface for holding a plurality of individual wafers in a generally vertical orientation; means mounted on the frame for rotating the support surface; a robotic arm assembly having a base positioned at the center of the rotatably mounted support surface and a manipulable arm which extends from the base and which can be selectively positioned relative to the frame; means mounted on the arm for detachably securing individual wafers; and means for manipulating the arm.