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특허 상세정보

MyON담기
내보내기 페이스북 공유 카카오톡 공유

Source of high flux energetic atoms

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B23K-009/00   
미국특허분류(USC) 219/12152 ; 219/12159 ; 219/12184 ; 219/1216
출원번호 US-0900616 (1986-08-26)
발명자 / 주소
출원인 / 주소
인용정보 피인용 횟수 : 18  인용 특허 : 27
초록
▼

Method and apparatus for generating a nearly mono-energetic beam of atoms at velocities on the order of several km/sec (energies of 1-10 eV) and for achieving modification of the surface properties of a target by the beam, including surface erosion, reaction with the beam species, cleaning and coating, all over a large area. A gas or gas mixture is forced through a nozzle throat into a previously evacuated expansion nozzle resulting in the acceleration of the gas in a confined flow. Laser radiation is applied to the gas flow to cause breakdown and dissoc...

대표
청구항

Apparatus for generating a nearly mono-energetic, high flux beam of high velocity atomic gas particles comprising: a vacuum chamber; nozzle means within the vacuum chamber for ejecting a confined flow of a gas into a narrow aperture; means for causing breakdown of the gas flow into a plasma within the narrow aperture; means for accommodating volumetric expansion of the plasma to produce a high velocity nearly mono-energetic atomic beam.

이 특허에 인용된 특허 (27)

  1. Pincon Andrew J. (1819 Grand Ave. Chicago IL 60602). Activated oxygen product and water treatment using same. USP1980074214962.
  2. Bruel Michel (Veurey FRX) Floccari ; deceased Michel (late of Grenoble FRX by Henriette Floccari ; administratrix) Michaud Jean-Francois (Montmelian FRX). Apparatus for treating a sample by a pulsed electron beam. USP1985074527044.
  3. Fowler Michael C. (Farmington CT) Smith David C. (Glastonbury CT). CO2 Coupling material. USP1984014426843.
  4. Snelling ; David R. ; Suart ; Robert D. ; Foster ; Kenneth D.. Chemical laser process and apparatus. USP1978074099140.
  5. Ogren John R. (La Palma CA) Rutkowski Eugene V. (Palos Verdes CA) Appel Marvin (Redondo Beach CA). Chemical laser pump. USP1976113992685.
  6. Blumenthal Jack L. (Los Angeles County CA) Ogren John R. (Orange County CA) Rutkowski Eugene V. (Los Angeles County CA) Appel Marvin (Los Angeles County CA). Chemical laser pump including cryogenic and condensing means. USP1985044514698.
  7. D\Antonio Nicholas F. (Liverpool NY). Control system and method of controlling ion nitriding apparatus. USP1982054331856.
  8. Vaseen Vesper A. (9840 W. 35th Ave. Wheatridge CO 80033). Converting oxygen to ozone by U.V. radiation of a halogen saturated hydrocarbon liquid containing dissolved or absorbed. USP1980014182663.
  9. Lehmann Jean-Claude (Paris FRX). Device for separating isotopes. USP1979054155722.
  10. Navratil ; Gerald A. ; Neil ; George R.. Electrode structures for high energy high temperature plasmas. USP1978124129772.
  11. Channell Ronald E. (Edwards CA) O\Pray John E. (Edwards CA) Roberto Francisco Q. (Lancaster CA). Fluorine generating formulation for use in chemical lasers. USP1977014001136.
  12. Monsler Michael J. (Reading MA). Laser powered rocket engine using a gasdynamic window. USP1977074036012.
  13. McDonald Joseph K. (Athens AL) Merritt James A. (Pulaski TN). Laser-induced production of nitrosyl fluoride for etching of semiconductor surfaces. USP1985084536252.
  14. Guillaneux Pierre (Chaville FR) Patou Claude (Le Perreux FR) Tonon Gianfranco (Limeil-Brevannes FR). Method and apparatus for injection of a plasma. USP1976013935504.
  15. Szoke ; Abraham. Method and apparatus for isotope separation from a gas stream. USP1978104119509.
  16. Obenshain David N. (Swanton MD). Method and apparatus for making ozone. USP1984014427636.
  17. Pilipovich ; Donald ; Goldberg ; Ira B. ; Wagner ; Ross I.. Method for producing singlet molecular oxygen. USP1978074102950.
  18. Suzuki ; Shin ; Matsumoto ; Kazuo ; Nakaoka ; Ichiro. Method of decomposing nitrogen oxide (NO.sub.x). USP1978024076606.
  19. Roberts Thomas G. (Huntsville AL). Nuclear activated cw chemical laser. USP1982044327338.
  20. Mastrup Frithjof N. (Palos Verdes Peninsula CA) Wang John H. S. (Rancho Palos Verdes CA). Optical resonance pumped transfer laser with high multiline photon-to-single-line photon conversion efficiency. USP1979034145668.
  21. Vaseen Vesper A. (9840 W. 35th Ave. Wheatridge CO 80033). Ozone production via laser light energy. USP1981024252623.
  22. Holroyd Richard A. (Stony Brook NY) Bielski Benon H. J. (Wading River NY). Photochemical method for generating superoxide radicals (O2-) in aqueous solutions. USP1980044199419.
  23. Friichtenicht ; Joseph Fred. Pulsed atomic beam apparatus. USP1978054091256.
  24. Thayer ; III William J. (Kent WA) Artura Carmine J. (Kent WA). Reagent tailoring for a chemical gas laser to obtain uniform initial chemical reaction rate. USP1982114360923.
  25. Spencer Donald J. (Torrance CA). Sensitive laser spectroscopy measurement system. USP1980064208129.
  26. Schaefer Robert J. (Springfield VA) Ayers Jack D. (Oakton VA) Tucker Thomas R. (Worthington OH). Surface hardening by particle injection into laser melted surface. USP1981114299860.
  27. Ninomiya Ken (Nakano JPX) Suzuki Keizo (Hachioji JPX) Nishimatsu Shigeru (Kokubunji JPX). Surface treatment apparatus. USP1985064522674.

이 특허를 인용한 특허 피인용횟수: 18

  1. Popp, Shane M.. Apparatus for monitoring pharmaceutical manufacturing processes. USP2015049008815.
  2. Hinchliffe Robert D.. Beam source for production of radicals and metastables. USP1998105821548.
  3. Kubiak Glenn D. ; Bernardez ; II Luis J.. Erosion resistant nozzles for laser plasma extreme ultraviolet (EUV) sources. USP2000016011267.
  4. Devendra Kumar ; Satyendra Kumar ; Michael L. Dougherty. Laser phase transformation and ion implantation in metals. USP2002096454877.
  5. Reents ; Jr. William D. (Middlesex NJ). Laser-assisted particle analysis. USP1997055631462.
  6. Popp, Shane M.. Manufacturing execution systems (MES). USP2013078491839.
  7. Truche, Jean-Luc; Goodley, Paul C.; Overney, Gregor. Method and apparatus for surface desorption ionization by charged particles. USP2010057723678.
  8. Truche, Jean-Luc; Goodley, Paul C.; Overney, Gregor. Method and apparatus for surface desorption ionization by charged particles. USP2012038129677.
  9. Das, Mrinal K.; Agarwal, Anant K.; Palmour, John W.; Grider, Dave. Methods of fabricating oxide layers on silicon carbide layers utilizing atomic oxygen. USP2009087572741.
  10. Das, Mrinal K.; Agarwal, Anant K.; Palmour, John W.; Grider, Dave. Methods of fabricating oxide layers on silicon carbide layers utilizing atomic oxygen. USP2012028119539.
  11. Popp, Shane M.. Methods of monitoring acceptance criteria of pharmaceutical manufacturing processes. USP2014028660680.
  12. Popp, Shane M.. Methods, systems, and software program for validation and monitoring of pharmaceutical manufacturing processes. USP201207RE43527.
  13. Popp, Shane M.. Monitoring acceptance criteria of pharmaceutical manufacturing processes. USP2013118591811.
  14. Popp, Shane M.. Monitoring liquid mixing systems and water based systems in pharmaceutical manufacturing. USP2016049304509.
  15. Popp, Shane M.. Monitoring pharmaceutical manufacturing processes. USP2015119195228.
  16. Popp, Shane M.. Monitoring tablet press systems and powder blending systems in pharmaceutical manufacturing. USP2015079092028.
  17. Hess, Wayne P.; Joly, Alan G.; Gerrity, Daniel P.; Beck, Kenneth M.; Sushko, Peter V.; Shlyuger, Alexander L.. Particle generator. USP2005066911649.
  18. Minton Timothy K. ; Giapis Konstantinos P.. Semiconductor etching by hyperthermal neutral beams. USP1999035883005.

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