초록 ▼

A photo chemical reaction apparatus comprises a vacuum container partitioned into a reaction chamber and a carrier chamber by use of partition board. The partition board has an opening into which a carrier tray can be detachably inserted so as to cause the rection chamber to be hermetically sealed.

A photo chemical reaction apparatus comprises a vacuum container partitioned into a reaction chamber and a carrier chamber by use of partition board. The partition board has an opening into which a carrier tray can be detachably inserted so as to cause the rection chamber to be hermetically sealed. The carrier tray has a substrate holder opposite to a light-penetrating window. A reaction gas flows between this window and a substrate to be processed mounted on the substrate holder.

대표청구항 ▼

A photo chemical reaction apparatus for treating a workpiece with a reaction gas and light, comprising: a light source; movable carrier means for transporting workpieces to be photo chemically treated, including a carrier tray, having supporting means and a light-penetrating window for exposing a wo

A photo chemical reaction apparatus for treating a workpiece with a reaction gas and light, comprising: a light source; movable carrier means for transporting workpieces to be photo chemically treated, including a carrier tray, having supporting means and a light-penetrating window for exposing a workpiece to the light source; and a processing vacuum container defining a reaction chamber for exposing the workpiece to the reaction gas and the light from the light source and a carrier chamber.