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Double implanted LDD transistor self-aligned with gate 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-029/78
  • H01L-027/02
  • H01L-023/48
출원번호 US-0123693 (1987-11-23)
발명자 / 주소
  • Huang Tiao-Yuan (Cupertino CA)
출원인 / 주소
  • Xerox Corporation (Stamford CT 02)
인용정보 피인용 횟수 : 78  인용 특허 : 19

초록

An improved double implanted and aligned LDD transistor comprising a gate having a central alignment member and a pair of outboard alignment members having portions contiguous with the gate oxide layer. A lightly doped junction is aligned with the central alignment members and a heavily doped juncti

대표청구항

An LDD transistor comprising a semiconductor substrate bearing thereon a gate insulating layer and a gate, characterized in that said gate includes a central portion and a pair of outboard portions straddling said central portion, each of said central and outboard portions having laterally spaced al

이 특허에 인용된 특허 (19)

  1. Riseman Jacob (Poughkeepsie NY) Tsang Paul J. (Poughkeepsie NY), Fabrication process of sub-micrometer channel length MOSFETs.
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  10. Han Yu-Pin (Dallas TX) Chan Tsiu C. (Carrollton TX), Method of making MOSFET by multiple implantations followed by a diffusion step.
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