초록 ▼

In apparatus for charging and discharging substrates, substrates are disposed in a magazine or substance store and into the pre-chamber of a high-vacuum-processing-chamber which is made as a vacuum chamber, the magazine being pushed into a housing, which at its lower side provides an opening. The ho

In apparatus for charging and discharging substrates, substrates are disposed in a magazine or substance store and into the pre-chamber of a high-vacuum-processing-chamber which is made as a vacuum chamber, the magazine being pushed into a housing, which at its lower side provides an opening. The housing can be deposited with the magazine onto the upper part of the wall of the lower box, an air lock plate held below an opening in the upper part of the wall taking the magazine and lowering it into a lower position by means of a pair of lifting cylinders. After this the air lock plate with the magazine and the pair of lifting cylinders are movable laterally on a conveying-slide-carriage, until the air lock plate is positioned below the passage of opening in the bottom part of the vacuum chamber. Eventually the air lock plate can be moved so far up in a vertical direction, until the magazine is disposed in the pre-chamber and until the air lock plate, which is a little bigger, closes the opening of passage.

대표청구항 ▼

Apparatus for the charge and discharge of substrates in a vacuum tank having an opening, into a pre-chamber of a high vacuum processing chamber for treating the surfaces of the substrates, comprising: a substrate holder, a substrate store, an air lock plate onto which the substrate store can be disp

Apparatus for the charge and discharge of substrates in a vacuum tank having an opening, into a pre-chamber of a high vacuum processing chamber for treating the surfaces of the substrates, comprising: a substrate holder, a substrate store, an air lock plate onto which the substrate store can be disposed, a first housing having a charge opening, which is open towards a lower side of the first housing enclosing the store, the first housing having a rotatable lower border, a lower box enclosing the apparatus and having a wall having an upper portion on which the rotatable lower border rests, means for moving the air lock plate vertically and horizontally, the first housing resting sealingly on the lower box and closing the charge-opening for the substrate store, said means for moving the air lock plate being positioned to move the air lock plate to the opening of the tank, the opening of the tank being connected to the lower box and being closable.