초록 ▼

The present invention provides a method and apparatus for controlling the fluid flow bias of continuous, multiple zone processes having gas or vapor comprising atmospheres that are in immediate access to each other. Active control of the fluid flow bias in at least one process zone or control of the

The present invention provides a method and apparatus for controlling the fluid flow bias of continuous, multiple zone processes having gas or vapor comprising atmospheres that are in immediate access to each other. Active control of the fluid flow bias in at least one process zone or control of the overall process fluid flow bias is achieved by applying force to at least one of the zones of the process in a manner which enables such control. A physical or chemical property or a change thereof in at least one process atmosphere is monitored and an appropriate amount of force is applied in response to the monitored property. The monitored property is related to the furnace flow bias by an algorithm, so that the flow bias can be controlled by controlling the at least one chemical or physical property monitored.

대표청구항 ▼

A method for controlling fluid flow bias within a multiple zone furnace chamber having a free flow of non-air containing gas atmospheres from one zone to another, comprising: (a) withdrawing a sample of non-air containing atmosphere from within at least one of said zones; (b) analyzing said non-air

A method for controlling fluid flow bias within a multiple zone furnace chamber having a free flow of non-air containing gas atmospheres from one zone to another, comprising: (a) withdrawing a sample of non-air containing atmosphere from within at least one of said zones; (b) analyzing said non-air containing atmosphere sample for at least one chemical or physical property that is indicative of the existing flow bias, or of a change in said flow bias, in the zone from which said sample was withdrawn; (c) comparing the property value, or change in property value, obtained upon the analysis of step (b) above with a reference set point or range for said property, or change of property; and (d) injecting a non-air containing fluid into one of said zones of non-air containing gas atmospheres so as to actively apply a force within one of said zones in response to said comparison of the analyzed property value, or change in property value, with the reference set point of range, thereby controlling the fluid flow bias within said zones to conform the analyzed property with said reference set point or range, whereby fluid flow bias within the multiple zone furnace is conveniently controlled without the introduction of air into the multiple zone furnace or into the gas analysis sample and system employed for such control purposes.