초록 ▼

An apparatus for the producton of particular concentrations of gaseous materials as well as for mixing different gaseous materials in a specified ratio in which the gaseous materials are supplied from different sources in pulsed fashion to at least one common outlet. The gaseous materials are passed

An apparatus for the producton of particular concentrations of gaseous materials as well as for mixing different gaseous materials in a specified ratio in which the gaseous materials are supplied from different sources in pulsed fashion to at least one common outlet. The gaseous materials are passed through a valve which has n inlets and m outlets, n and m being whole numbers. This valve can connect at least one inlet for a specifiable time with a particular outlet. The valves are controlled preferably by a pulse-width modulated method, for example by means of a microprocessor. A gas pump is connected downstream from the common outlet.

대표청구항 ▼

Apparatus for mixing a plurality of component gases in a specified ratio, comprising a plurality of sources for the respective plurality of gases, a multiway valve with “n”inlets and “m”outlets, where n and m are integers and n>m, said inlets being connected to respective sources, means for operatin

Apparatus for mixing a plurality of component gases in a specified ratio, comprising a plurality of sources for the respective plurality of gases, a multiway valve with “n”inlets and “m”outlets, where n and m are integers and n>m, said inlets being connected to respective sources, means for operating said valve in order to supply component gases to at least one of said outlets in pulsed fashion, a buffer vessel downstream of said at least one of said outlets, said vessel serving to mix said component gases in the specified ratio, and a gas pump downstream of said buffer vessel, said gas pump serving to pump the gases mixed in the specified ratio, said gas pump operating during pulsed supply of said component gases to said buffer vessel, whereby output fluctuations related to the types of component gases being supplied are eliminated and the output of the pump is continuous.