초록 ▼

Amorphous layers are made by decomposing one or several gaseous compounds which include an element or elements to be deposited. These are group 3 and 5 or group 4 elements but amorphous layers of other metals can also be made. The compound is added in a small concentration to a hot gas, preferably h

Amorphous layers are made by decomposing one or several gaseous compounds which include an element or elements to be deposited. These are group 3 and 5 or group 4 elements but amorphous layers of other metals can also be made. The compound is added in a small concentration to a hot gas, preferably hydrogen, helium or argon and a diffusor accelerates the mixture while molecular clusters of the element or elements are formed and impinge upon a target for depositing thereon.

대표청구항 ▼

Method of providing and producing a layer on a carrier or on a substrate, the layer to include one or two particular elements, comprising the steps of; providing a gaseous blend which includes a compound or compounds of said element or elements together with a carrier gas, the carrier gas being a la

Method of providing and producing a layer on a carrier or on a substrate, the layer to include one or two particular elements, comprising the steps of; providing a gaseous blend which includes a compound or compounds of said element or elements together with a carrier gas, the carrier gas being a larger component in the blend; providing for a decomposition process of said compound such that molecular clusters are formed and are included in and as a result of the decomposition process, the clusters including said element or elements; accelerating the clusters non-electrically by means of a nozzle into a vacuum chamber to obtain an expansion cone and whereby essentially all acceleration after leaving the nozzle is caused by the nozzle; and providing a target in the vacuum and in a flow path of the clusters as they emerge from said nozzle to be impinged upon by the clusters as having been accelerated by the nozzle, while a shock wave of carrier gas causes the carrier gas to be decelerated ahead of the target.