초록 ▼

A vacuum-tight wafer carrier. The wafers are supported at each side by a slightly sloping shelf, so that minimal contact (line contact) is made between the wafer surface and the surface of the shelf. This reduces generation of particulates by abrasion of the surface of the wafer. The door of the vac

A vacuum-tight wafer carrier. The wafers are supported at each side by a slightly sloping shelf, so that minimal contact (line contact) is made between the wafer surface and the surface of the shelf. This reduces generation of particulates by abrasion of the surface of the wafer. The door of the vacuum carrier contains elastic elements to press the wafers lightly against the back of the carrier box. Thus, when the door of the box is closed, the wafers are restrained from rattling around, which further reduces the internal generation of particulates.

대표청구항 ▼

In an apparatus for storage and transport of wafers; an evacuable and transportable housing for containing an array of wafers; said housing having an access port therein for accessing the wafers contained within said housing; closure means for closing and sealing said access port in said housing; an

In an apparatus for storage and transport of wafers; an evacuable and transportable housing for containing an array of wafers; said housing having an access port therein for accessing the wafers contained within said housing; closure means for closing and sealing said access port in said housing; and means for producing a pressure differential between the pressure of the surrounds of said housing relative to the subatmospheric pressure contained within said housing to cause said closure means to be urged into gaseous sealing engagement with the evacuated housing by atmospheric pressure, whereby the wafers are contained in an evacuated transportable housing means for transport and storage at atmospheric pressure.