초록 ▼

An inertial guidance accelerometer is formed as an integrated, monolithic, structure. Silicon micro-machining techniques are used to combine mechanical and electrical components of the device in a single crystal silicon wafer. The proof mass, flexible hinge, and resonator are formed by etching porti

An inertial guidance accelerometer is formed as an integrated, monolithic, structure. Silicon micro-machining techniques are used to combine mechanical and electrical components of the device in a single crystal silicon wafer. The proof mass, flexible hinge, and resonator are formed by etching portions of a substrate, while the electrical circuits are monolithically integrated into the substrate using standard circuit integration techniques. The accelerometer includes a feedback control circuit for the resonator, as well as a digital-to-analog converter, for providing digital output signals indicative of the acceleration force applied to the device.

대표청구항 ▼

An integrated accelerometer comprising: a substrate having a monolithic single crystal structure including therein: mechanical means for oscillating at a predetermined frequency in response to application thereto of a predetermined acceleration; said mechanical means including proof mass structure m

An integrated accelerometer comprising: a substrate having a monolithic single crystal structure including therein: mechanical means for oscillating at a predetermined frequency in response to application thereto of a predetermined acceleration; said mechanical means including proof mass structure monolithically integrated in said substrate; flexible hinging means monolithically integrated in a separating region in said substrate formed between a main body portion of said substrate and said proof mass structure for hingedly connecting said proof mass structure to said main body portion of said substrate; and resonating means monolithically integrated in said separating region of said substrate substantially opposite said flexible hinging means and connected between said proof mass structure and said main body portion, thereby restraining rotation of said proof mass structure about said flexible hinging means in one direction, said resonating means being operable for converting mechanical acceleration of said proof mass structure to an oscillating signal; and electrical means for converting oscillation of said mechanical means to an electrical signal indicative of a magnitude of said acceleration applied to said mechanical means.