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[미국특허] Automated diagnostic system 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G06F-011/30
  • G06F-015/46
출원번호 US-0256020 (1988-10-11)
발명자 / 주소
  • English Roe E. (Euless TX) Kilgore Michael A. (McKinney TX) Crone Jerry A. (Kaufman TX)
출원인 / 주소
  • Texas Instruments Incorporated (Dallas TX 02)
인용정보 피인용 횟수 : 38  인용 특허 : 10

초록

Artificial intelligence diagnostic expert system software is used to interrogate and monitor etcher machine state by directly accessing vital hardware/process sensors. Sensor values and ‘recipe’variables are analyzed to determine cause of failures and recommend repair strategies, realtime monitoring

대표청구항

An automated diagnostic system, comprising: a machine for performing process steps on a workpiece, wherein a plurality of process variables assume different states; an interface coupled to said machine for sensing the state of said plurality of process variables, and for controlling said plurality o

이 특허에 인용된 특허 (10) 인용/피인용 타임라인 분석

  1. Davis Cecil J. (Greenville TX) Carter Duane E. (Plano TX) Jucha Rhett B. (Celeste TX), Apparatus for plasma assisted etching.
  2. Davis Cecil J. (Greenville TX) Johnson Randall E. (Carrollton TX) Spencer John E. (Plano TX), Automated plasma reactor.
  3. Ziehm Richard T. (Webster NY) Wilczek Stephen P. (Fairport NY) Baker George E. (Rochester NY) Husted Raymond R. (Rochester NY) Dumas Glen A. (Henrietta NY) Bunker Keith G. (Rochester NY) Place ; Jr. , Control system job recovery after a malfunction.
  4. Kemper Christian T. (Winter Park FL) Bellows James C. (Seminole FL) Kleinosky Pamela J. (Philadelphia PA), Diagnostic apparatus.
  5. Tashiro Tsutomu (Sagamihara JPX) Haruna Koichi (Yokohama JPX) Komoda Norihis (Kawasaki JPX), Facilities control method.
  6. Franke David W. (Austin TX) Hall Carroll R. (Austin TX), Method for generating and displaying tree structures in a limited display area.
  7. Moore William H. (Bridgewater NJ) Gutowski Charles M. (Paramus NJ) Trosky William J. (Wilkinsburg PA) Butler Thomas A. (Pittsburgh PA), Methods of servicing an elevator system.
  8. Kemper Christian T. (Winter Park FL) Lowenfeld Simon (Monroeville PA) Fox Mark S. (Pittsburgh PA), Rule based diagnostic system with dynamic alteration capability.
  9. Hogan ; Jr. Thomas J. (Enumclaw WA) Kasprick Jon J. (Federal Way WA) Anderson Donald R. (Auburn WA) Kersh Douglas W. (Seattle WA), Test system and method using artificial intelligence control.
  10. Davis Cecil J. (Greenville TX) Matthews Robert (Plano TX) Hildenbrand Randall C. (Richardson TX), Vacuum processing system.

이 특허를 인용한 특허 (38) 인용/피인용 타임라인 분석

  1. Millett, Peter J.; Burns, Gary D.; Brobst, Gary E., Apparatus and method for analyzing chemical system data.
  2. Aaron,Jeffrey A., Automated diagnosis for computer networks.
  3. Aaron,Jeffrey A., Automatically facilitated support for complex electronic services.
  4. Rogers Steven W. (Conway AR) Dale ; Jr. James L. (Conway AR) Casby Alan D. (Conway AR) de Bellefeuille Jean O. W. (Maumelle AR), Automotive service equipment expert system.
  5. Doyle, Ronald P.; Kaminsky, David Louis, Autonomic program error detection and correction.
  6. French ; Jr. Norman L., Circuit and apparatus for verifying a chamber seal, and method of depositing a material onto a substrate using the same.
  7. Norman L. French, Jr., Circuit and apparatus for verifying a chamber seal, and method of depositing a material onto a substrate using the same.
  8. Takahashi Fuminobu,JPX ; Koike Masahiro,JPX ; Uchida Shunsuke,JPX ; Fujimori Haruo,JPX ; Yamada Izumi,JPX ; Fukuzaki Takaharu,JPX ; Nagase Makoto,JPX, Diagnosis system.
  9. Bauer, Klaus; Hammann, Gerhard; Bock, Hans-Peter, Dialogue system and method for examining machining processes.
  10. Aaron, Jeffrey A., Electronic vulnerability and reliability assessment.
  11. Roe, Kevin, Expert system reliability assistance for electronics.
  12. Kazuki Shigeta JP, Failure analysis system, method for managing estimated logic status and information storage medium for programmed instruction of the method.
  13. Kahn,Malcolm R.; Man,Piu Francis; Martin,Glenn, Fluid monitoring systems and methods with data communication to interested parties.
  14. Kahn,Malcolm R.; Martin,Glenn; Man,Piu Francis, Fluid treatment apparatus with input and output fluid sensing.
  15. Smith Shawn ; Balachandran Hari ; Parker Jason, IC test software system for mapping logical functional test data of logic integrated circuits to physical representation.
  16. Nguyen Phuc Luong,CAX ; Goldman Avrum,CAX ; Graham Peter H.,CAX ; McCormick R. Ian,CAX, Maintenance and warranty control system for aircraft.
  17. Nguyen Phuc Luong,CAX ; Goldman Avrum,CAX ; Graham Peter H.,CAX ; McCormick R. Ian,CAX, Maintenance and warranty control system for aircraft.
  18. Yamamoto,Hideyuki; Masuda,Toshio; Ikuhara,Shoji; Kagoshima,Akira; Tanaka,Junichi, Maintenance method and system for plasma processing apparatus.
  19. Salonen, Esa, Method and apparatus for monitoring the operation of an industrial process.
  20. Hallberg, Bryan Severt; Feather, Gary A.; Borden, George Rome; Shivaji-Rao, Vishnu-Kumar, Method and system for configuring media-playing sets.
  21. Shivaji-Rao, Vishnu Kumar; Gil, Fernando Amat, Method and system for evaluating media-playing sets.
  22. Hainzl, Stefan, Method for automatically monitoring at least one component of a physical system.
  23. Kaushal, Sanjeev; Sugishima, Kenji; Rao, Donthineni Ramesh Kumar, Method of monitoring a semiconductor processing system using a wireless sensor network.
  24. Kahn,Malcolm R.; Man,Piu Francis; Martin,Glenn, Multi-sensor system for fluid monitoring with selective exposure of sensors.
  25. Shivaji-Rao, Vishnu Kumar, Personalized assistance with setup of a media-playing set.
  26. Uchihara Shoichi,JPX ; Ishii Michihiro,JPX, Plant support system.
  27. Chu Po-Tao,TWX ; Yeh Ming-Chieh,TWX ; Chen Fang-Cheng,TWX ; Lu Ting-Yih,TWX, Plasma etch method for forming metal-fluoropolymer residue free vias through silicon containing dielectric layers.
  28. Cambot Jean-Michel (Paris FRX) Liautaud Bernard (New York NY), Relational database access system using semantically dynamic objects.
  29. Cambot, Jean-Michel; Liautaud, Bernard, Relational database access system using semantically dynamic objects.
  30. Cambot, Jean-Michel; Liautaud, Bernard, Relational database access system using semantically dynamic objects.
  31. Jacobson Gary ; Kirschner Wesley ; Ramadei Michael, Remote automatic diagnostic analyzer for integrated mailing machines.
  32. Hussey, Patrick Alan; Abreu, Maryellen, Robot and server with optimized message decoding.
  33. Akio Aoki JP, Semiconductor exposure apparatus and device manufacturing method using the same.
  34. Greenlee, Gordan; Hanrahan-Locke, Victoria; Martin, Jr., James A.; Murray, Douglas G., Solution for checking a health of a computer system.
  35. Shivaji-Rao, Vishnu Kumar, System and method for adjusting a media-playing set.
  36. Rasiklal Punjalal Shah ; Vipin Kewal Ramani ; Susan Teeter Wallenslager ; Christopher James Dailey, System and method for integrating a plurality of diagnostic related information.
  37. Henry, Kenneth W.; Rhoden, James A.; Inskeep, Todd Michael, System and method for performance monitoring of operational equipment used with machines.
  38. Kahn,Malcolm R.; Michalak,Uwe; Papageorgiou,Dimitris, Systems and methods for fluid quality sensing, data sharing and data visualization.

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