초록 ▼

An elongated fast cycle cryopump device connected to a refrigerant source has a rigid head section adapted to extend through a pass-through opening of a vacuum chamber. The head end section has a feed tube and a return flow passage, the feed tube being connected to a valve for selectively receiving

An elongated fast cycle cryopump device connected to a refrigerant source has a rigid head section adapted to extend through a pass-through opening of a vacuum chamber. The head end section has a feed tube and a return flow passage, the feed tube being connected to a valve for selectively receiving either a relatively cold refrigerant or a relatively hot refrigerant during different phases of operation. A flexible probe section connected to the rigid head end section is capable of being shaped in different ways to assume a preselected or variable configuration within the vacuum chamber workspace and includes a flexible feed tube connected to the feed tube of the head end section for carrying the refrigerants passing through the head section outwardly to the end of the flexible probe section. A flexible outer tubular member surrounding the flexible feed tube provides a return passage for the refrigerants along the flexible probe section and through the head section. When cold refrigerant flows in the flexible probe section during a vacuum cycle within a chamber, water vapor is condensed on its outer surface, and at the end of the cycle when hot refrigerant is flowing in the probe, condensed water vapor is released from the flexible probe section to the surrounding atmosphere.

대표청구항 ▼

An elongated fast cycle cryopump probe device for use within a vacuum chamber having a wall section with a pass-through opening, said device comprising: a rigid head end section adapted to be mounted on said wall section of said vacuum chamber while extending within a pass-through, said head end sec

An elongated fast cycle cryopump probe device for use within a vacuum chamber having a wall section with a pass-through opening, said device comprising: a rigid head end section adapted to be mounted on said wall section of said vacuum chamber while extending within a pass-through, said head end section having a feed tube and a return flow passage; valve means connected to said feed tube means for selectively receiving either a relatively cold refrigerant or a relatively hot refrigerant during different phases of operation; a flexible probe section connected to said rigid head end section which is capable of being shaped in different ways to assume a preselected or variable configuration within the vacuum chamber workspace, said probe section including a flexible feed tube connected to said feed tube means of said head end section for carrying said refrigerants passing through said head section outwardly to the end of said flexible probe section; a flexible outer tubular member surrounding said flexible feed tube for providing a return passage for said refrigerants along said probe section and through said head section; whereby when said cold refrigerant is flowing in said probe during a vacuum cycle within said chamber, water vapor is condensed on the outer surface of said flexible probe section and at the end of said cycle when said hot refrigerant is flowing in the probe, condensed water vapor is released from the flexible probe section to the surrounding atmosphere.