IPC분류정보
| 국가/구분 |
United States(US) Patent
등록
|
| 국제특허분류(IPC7판) |
|
| 출원번호 |
US-0403355
(1989-09-06)
|
| 우선권정보 |
JP-0230578 (1988-09-14); JP-0168333 (1989-06-30) |
|
발명자
/ 주소 |
- Kiriseko Tadashi (Kanagawa JPX) Tani Hiromichi (Kawasaki JPX) Soma Noriko (Yokohama JPX) Shigemi Nobuhisa (Kawasaki JPX) Toyoda Takayuki (Yokkaichi JPX)
|
| 출원인 / 주소 |
- Fujitsu Limited (Kawasaki JPX 03)
|
| 인용정보 |
피인용 횟수 :
73 인용 특허 :
4 |
초록
▼
A continuous semiconductor substrate processing system is operated by a system control structure in accordance with a predetermined processing program. A wafer conveying mechanism conveys wafers to and from each of plural process stations, each of which performs a corresponding process step on semic
A continuous semiconductor substrate processing system is operated by a system control structure in accordance with a predetermined processing program. A wafer conveying mechanism conveys wafers to and from each of plural process stations, each of which performs a corresponding process step on semiconductor wafers, to and from a stocker and to and from an inspection unit. Carriers, movable by manual or mechanical structure other than the wafer conveying mechanism, provide for alternative conveying of wafers to and from each of the process stations, the stocker and the inspection station. The system control structure monitors and selectively controls each of the wafer conveying mechanism, the process stations and the stocker and issues instructions for movement of the carriers and monitors the positioning of carriers for selective control of the transfer of wafers and the priority sequence of processing of wafers, to maintain continuous performance of plural process steps on plural lots of semiconductor wafers.
대표청구항
▼
A continuous semiconductor wafer processing system for continuously performing a plurality of process steps, in accordance with one or more predetermined sequences of such process steps, on one or more lots of semiconductor wafers, comprising: a wafer conveying mechanism; plural carriers and means f
A continuous semiconductor wafer processing system for continuously performing a plurality of process steps, in accordance with one or more predetermined sequences of such process steps, on one or more lots of semiconductor wafers, comprising: a wafer conveying mechanism; plural carriers and means for moving each carrier independently of the conveying mechanism, each carrier having a capacity of receiving up to a predetermined number of semiconductor wafers to be conveyed thereby and being configured for automated transfer of semiconductor wafers to and from the carrier; plural process stations for performing plural, successive process steps on semiconductor wafers to be processed by the processing system, each process station performing a respective, predetermined one of the process steps; plural interface units respectively associated with said plural process stations, each interface unit coupling the respectively associated process station to the conveying mechanism and comprising a wafer discrimination section for discriminating semiconductor wafers, a buffer section for temporarily storing discriminated semiconductor wafers and adapted for mounting a carrier therein and being operable for selectively transferring semiconductor wafers to and from the carrier, and a transfer mechanism, the transfer mechanism of each interface unit coupling the conveying mechanism and the respectively associated process station and being selectively operable for transferring semiconductor wafers therebetween, the transfer mechanism being coupled to each of the buffer and wafer discrimination sections and being selectively and jointly operable with each thereof for transferring wafers to and from the buffer section and to and from the wafer discrimination section; a stocker coupled to said conveying mechanism and selectively and jointly operable therewith for transferring semiconductor wafers therebetween, the stocker temporarily storing the semiconductor wafers, as transferred thereto, during time intervals intermediate the performance of successive processing steps thereon, the stocker comprising a wafer discrimination section for discriminating semiconductor wafers, a carrier feed-in/feed-out section adapted for mounting of a carrier therein and selectively operable for transfer of semiconductor wafers therebetween, a wafer storage section, and a transfer mechanism, the transfer mechanism being coupled to the conveying mechanism and being selectively operable therewith for transferring semiconductor wafers therebetween, and being coupled to each of the wafer storage section, the wafer discrimination section and the carrier feed-in/feed-out section and selectively and jointly operable with each said section for transfer of semiconductor wafers therebetween; conveying mechanism control means for controlling the conveying mechanism, selectively, to convey semiconductor wafers to and from each of the respectively associated process stations and interface units and to and from the stocker; and system control means, operable in accordance with a predetermined processing program which defines said one or more predetermined sequences of process steps to be performed on corresponding, discriminated lots of semiconductor wafers, for communicating with and thereby monitoring and controlling each of the interface units and respectively associated process stations, the stocker, and the conveying mechanism control means, selectively for each discriminated lot of semiconductor wafers and in accordance with the next process step of the sequence to be performed thereon, the system control means selecting the corresponding process station for performance of that next process step on each such discriminated lot and controlling the conveying of each such lot to the corresponding, selected process station, the transferring of each such lot by the transfer mechanism of the respectively associated interface unit to the selected process station for performance of the process step thereon and, upon completion of the performance of the process step, the transferring of each such lot from the process station and the further conveying thereof, alternatively, to a next selected process station or to the stocker for transfer thereto and temporary storage therein, and the transferring of each such lot from the stocker and the subsequent conveying thereof to a next process station, said system control means selectively controlling said conveying mechanism to effect said conveying and, alternatively, issuing instructions for moving each said carrier and thereby conveying the semiconductor wafers received therein, from and to successive, next selected process stations and said stocker, for all said lots of semiconductor wafers and in accordance with a priority order of processing of same as defined by the predetermined processing program.
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