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A high speed process for forming a multi layered thin film structure in a vacuum wherein each film is less than about four microns thick and the total layers can reach upwards to 4,000 or more. The polymeric layers are formed of a cross linked component selected from the group consisting of polyfunc

A high speed process for forming a multi layered thin film structure in a vacuum wherein each film is less than about four microns thick and the total layers can reach upwards to 4,000 or more. The polymeric layers are formed of a cross linked component selected from the group consisting of polyfunctional acrylates and mixtures of polyfunctional acrylates and monocrylates with the component having a preferable molecular weight of between 200 and 300 and a vapor pressure preferably in excess of 1×10-2 Torr. The polymeric layers may be interleaved with metal layers.

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A high-speed process for forming a multi layered article having a plurality of substantially delamination free, pin hole free and void free layers, comprising the following steps: (a) providing a vacuum chamber containing: i) a movable support, ii) at least one vapor outlet of a flash vaporizer moun

A high-speed process for forming a multi layered article having a plurality of substantially delamination free, pin hole free and void free layers, comprising the following steps: (a) providing a vacuum chamber containing: i) a movable support, ii) at least one vapor outlet of a flash vaporizer mounted adjacent to an upstream portion of said support, iii) at least one curing means mounted adjacent to a downstream portion of said support, iv) means for maintaining said support at a temperature below that of said vaporizer; and v) means for depositing an inorganic material; (b) evacuating gas from said chamber until the pressure within said chamber is less than about 1×10-4 Torr; (c) selecting a curable component comprising: i) polyfunctional acrylates, or ii) mixtures of monoacrylates and polyfunctional acrylates, said mixtures having an average of about two or more olefinic groups per molecule, said curable component having: i) an average molecular weight between 150 and 1,000, and ii) a vapor pressure in the range of 1×10-6 to 1×10-1 Torr at standard temperature and pressure; (d) metering a quantity of said curable component into an inlet portion of said vaporizer; (e) flash vaporizing said component within said vaporizer; (f) moving said support relative to said vapor outlet and said curing means at a rate of between about 1 cm/sec and 1,000 cm/sec; (g) condensing a film of vaporized component dispensed from said vapor outlet onto the surface of said support, said film having a thickness of 4 microns or less; (h) activating said curing means whereby a substantially cross linked polymer film is formed on said support; (i) repeating steps (c) through (h) and, (j) depositing a layer of inorganic material on one or more substantially cured polymer films whereby a multi layered article comprising a plurality of polymer layers and at least one inorganic material layer is formed.