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특허 상세정보

Bubbler container automatic refill system

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B67D-005/54   
미국특허분류(USC) 141/83 ; 141/94 ; 141/198 ; 141/382
출원번호 US-0585467 (1990-09-20)
발명자 / 주소
출원인 / 주소
인용정보 피인용 횟수 : 39  인용 특허 : 15
초록

A quick disconnnect connection for a bulk chemical supply container in an automatic refill system for a liquid chemical temperature controller is provided wherein replenishing liquid chemical is automatically supplied from the bulk chemical supply unit to a bubbler ampule in the liquid chemical temperature controller. The quick disconnect connection has shutoff valves that isolate the bulk chemical supply container to prevent depth contamination of the replenishing chemical upon connection and disconnection of the bulk supply chemical container from the ...

대표
청구항

In an automatic refill system for refilling a working container with ultra high purity liquid chemical from a bulk supply chemical container via a liquid chemical infeed line, the bulk supply chemical container having an open top and a closed bottom, an improved bulk supply chemical container connection apparatus connected to the top of the bulk supply chemical container comprising in combination: (a) a bulk supply container support shelf in the top of the bulk supply container; (b) a support fitting that removably engages the bulk supply container suppo...

이 특허에 인용된 특허 (15)

  1. Fair David L. (Rockford IL). Bubbler container automatic refill system. USP1990124979545.
  2. Taniguchi Nobuyuki (Hyogo JPX) Hoda Takeo (Osaka JPX) Hata Yoshiaki (Hyogo JPX) Kudo Yoshinobu (Osaka JPX) Inoue Manabu (Hyogo JPX) Ueda Hiroshi (Aichi JPX). Camera on which a front converter can be mounted. USP1990104967214.
  3. Di Gianfilippo Aleandro (Arlington Heights IL) Figler Alan A. (Algonquin IL). Flow monitoring method and apparatus. USP1984084467844.
  4. Purdy Chester A. (R.F.D. No. 1 Belmont WI 53510). Liquid proportioning device with insufficient supply and flow valves. USP1980034193515.
  5. Yamazaki Masahiro (Yokohama JPX) Iizuka Shigeru (Yokohama JPX) Kamiya Shigemitsu (Kawasaki JPX) Oka Yoshiro (Yokohama JPX) Fujino Katsuhiro (Yokohama JPX). Method and apparatus for feeding drug liquid from hermetic returnable can. USP1987064676404.
  6. Voza Alfonse N. (Jersey City NJ). Method and apparatus for filling a container. USP1983104408640.
  7. Taylor Paul R. (Market Harborough GB2). Method and apparatus for monitoring liquid stock in a storage tank. USP1986074598742.
  8. Schumacher John C. (Oceanside CA) Lagendijk Andre (Oceanside CA). Method of shipping and using semiconductor liquid source materials. USP1981114298037.
  9. Lynch Brian (Norcross GA) Narasimham Pundi L. (Norcross GA) Partus Fred P. (Marietta GA). Methods of and apparatus for vapor delivery control in optical preform manufacture. USP1986044582480.
  10. Denis Jean (Mesnil le roi FRX) Decaudin Jean-Michel (Velaux FRX). Optical probe. USP1987124713552.
  11. Miyajiri, Tetsuo; Habasaki, Toshimi; Yokota, Hiroshi; Tsurita, Tamio; Nakahara, Motohiro. Raw material supply device. USP1985104545801.
  12. Diez ; Jerry. Transfer device for heat sensitive material. USP1978104121633.
  13. Partus Fred P. (Cobb County GA). Vapor delivery system and method of maintaining a constant level of liquid therein. USP1980114235829.
  14. McMenamin Joseph C. (Fresno CA). Vapor mass flow control system. USP1983074393013.
  15. McMenamin Joseph C. (Oceanside CA). Vapor mass flow control system. USP1984034436674.

이 특허를 인용한 특허 피인용횟수: 39

  1. Blatt, Christopher S.; Pearce, Richard H.; Williams, Graham; Wentworth, III, Edward H.. Automatic refill system for ultra pure or contamination sensitive chemicals. USP2003086604555.
  2. Christopher S. Blatt ; Richard H. Pearce ; Graham Williams GB; Edward H. Wentworth, III. Automatic refill system for ultra pure or contamination sensitive chemicals. USP2002086435224.
  3. Stamp,Michael R.; AmRhein,Frederick J.; Dale,Arnold J.; Pottebaum,Joseph C.; Ebert,Brian J.. Bubbler for substrate processing. USP2008057370848.
  4. Stamp,Michael R.; AmRhein,Frederick J.; Dale,Arnold J.; Pottebaum,Joseph C.; Ebert,Brian J.. Bubbler for substrate processing. USP2006077077388.
  5. Craig M. Noah ; John N. Gregg ; Robert M. Jackson ; Craig Esser. Bulk chemical delivery system. USP2002086435229.
  6. Noah Craig M. ; Gregg John N. ; Jackson Robert M. ; Esser Craig. Bulk chemical delivery system. USP1999095950693.
  7. Noah Craig M. ; Gregg John N. ; Jackson Robert M. ; Esser Craig. Bulk chemical delivery system. USP2000056056024.
  8. Noah Craig M. ; Gregg John N. ; Jackson Robert M. ; Esser Craig. Bulk chemical delivery system. USP2001076260588.
  9. Noah, Craig M.; Gregg, John N.; Jackson, Robert M.; Esser, Craig. Bulk chemical delivery system. USP2003106637475.
  10. Venooker Ronald J. (Franklin MA) Scavitto John A. (Mendon MA) Karkantis Peter N. (Acton MA) Healey David T. (No. Reading MA) Travers Richard L. (Scituate MA). Cap assembly for fluid delivery system. USP1996125586673.
  11. Gregg John N. ; Noah Craig M. ; Jackson Robert M.. Chemical delivery system having purge system utilizing multiple purge techniques. USP2001036199599.
  12. Gregg John N. ; Noah Craig M. ; Jackson Robert M.. Chemical delivery system having purge system utilizing multiple purge techniques. USP2001106296025.
  13. Gregg John N. ; Noah Craig M. ; Jackson Robert M.. Chemical delivery system having purge system utilizing multiple purge techniques. USP2001106296026.
  14. John N. Gregg ; Craig M. Noah ; Robert M. Jackson. Chemical delivery system having purge system utilizing multiple purge techniques. USP2002106457494.
  15. Siegele Stephen H. (Campbell CA) Noah Craig M. (Mountain View CA) Gregg John N. (Marble Falls TX). Chemical refill system for high purity chemicals. USP1997035607002.
  16. Davison, Dale A.. Chromatographic solvent monitor. USP2012088246821.
  17. Davison,Dale A.. Chromatographic solvent monitor. USP2008097419598.
  18. Klotz Maynard F. ; Schueman Gary K.. Controller for system for filling gas cylinders with single gas or gas mixture. USP2000116152192.
  19. Klotz Maynard F. ; Schueman Gary K.. Controller for tank-filling system. USP2000066079459.
  20. Venooker Ronald J. (Franklin MA) Scavitto John A. (Mendon MA) Karkantis Peter N. (Acton MA) Healey David T. (No. Reading MA) Travers Richard L. (Scituate MA). Coupler for fluid delivery system. USP1996125586590.
  21. Jackson Robert M.. Delivery system and manifold. USP1999105964254.
  22. Kuo, Wen-Chang; Wang, Szu-Yao; Tseng, Wen-Hsiang. Filler for airtight container. USP2004026691738.
  23. Siegele Stephen H. ; Gregg John N. ; Noah Craig M.. High aspect ratio containers for ultrahigh purity chemicals. USP2000026029717.
  24. Birtcher,Charles Michael; Vivanco,Gildardo; Steidl,Thomas Andrew; Dunning,Richard J.. High purity chemical container with diptube and level sensor terminating in lowest most point of concave floor. USP2006107124913.
  25. Niland, William F.; Bamford, Owen S.; Cortez, Jr., Felino V.. Hyperthermic humidification system. USP20181010092722.
  26. Niland, William F.; Bamford, Owen S.; Cortez, Jr., Felino V.. Hyperthermic humidification system. USP2014128905023.
  27. Niland, William F.; Bamford, Owen S.; Cortez, Jr., Felino V.; McGarrity, George; Wheeler, David; Hagan, Luke. Hyperthermic humidification system. USP2011060640784.
  28. Siegele Stephen H. ; Noah Craig M. ; Gregg John N.. Level control systems for high purity chemical delivery systems. USP1998015711354.
  29. Siegele Stephen H. (Campbell CA) Noah Craig M. (Mountain View CA) Gregg John N. (Marble Falls TX). Manifold systems for high purity chemical delivery systems. USP1997015590695.
  30. Shimizu, Akira; Kobayashi, Akiko; Kanayama, Hiroki. Method for controlling flow and concentration of liquid precursor. USP2012048151814.
  31. Jursich, Gregory M.; Sirk, Kevin. Optical monitoring processes and apparatus for combined liquid level sensing and quality control. USP2003046543493.
  32. Siegele Stephen H. ; Noah Craig M. ; Gregg John N.. Refillable ampule and method re same. USP1999035878793.
  33. Siegele, Stephen H.; Noah, Craig M.; Gregg, John N.. Refillable ampule and method re same. USP2003056557593.
  34. Rodgers Donald B.. Self-metering reservoir. USP2000026019114.
  35. Rodgers Donald B.. Self-metering reservoir. USP1999085938985.
  36. Rodgers Donald B.. Self-metering reservoir. USP1999075921428.
  37. Rodgers Donald B.. Self-metering reservoir. USP2001126325094.
  38. Scholz, Christoph. Storage vessel for liquid high-purity substances. USP2003096615851.
  39. Rodgers, Donald B.. System, apparatus and method for measuring and transferring the contents of a vessel. USP2003076588458.