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[미국특허] Method for fabricating side drive electrostatic micromotor 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/306
  • B44C-001/22
  • C03C-015/00
  • C03C-025/06
출원번호 US-0542435 (1990-06-22)
발명자 / 주소
  • Howe Roger T. (Lafayette CA) Lang Jeffrey H. (Waltham MA) Schlecht Martin F. (Lexington MA) Schmidt Martin A. (Newton Highlands MA) Senturia Stephen D. (Boston MA) Mehregany Mehran (Shaker Heights OH
출원인 / 주소
  • Massachusetts Institute of Technology (Cambridge MA 02)
인용정보 피인용 횟수 : 70  인용 특허 : 2

초록 ▼

An electrostatic micromotor employs a side drive design. The stator operates in a plane above a substract and a moveable member lies and moves in the plane of the stator. An electrostatic field of operational strength is generated and sustained without breakdown in the plane between the stator and e

대표청구항 ▼

A method of fabricating an electrostatic micromotor comprising the steps of: providing a substrate in a plane; providing on the substrate a first structural layer patterned over a first sacrificial layer such that the sacrificial layer separates portions of the first structural layer from the substr

이 특허에 인용된 특허 (2) 인용/피인용 타임라인 분석

  1. Howe Roger T. (Belmont MA) Lang Jeffrey H. (Waltham MA) Schlecht Martin F. (Lexington MA) Schmidt Martin A. (Brookline MA) Senturia Stephen D. (Boston MA), Electrostatic micromotor.
    상세보기
  2. Muller Richard S. (Kensington CA) Fan Longsheng (Berkeley CA) Tai Yu C. (Albany CA), Micromechanical elements and methods for their fabrication.
    상세보기

이 특허를 인용한 특허 (70) 인용/피인용 타임라인 분석

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    상세보기
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