[특허]Steam generator

[미국특허] Steam generator 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	F22B-001/28
출원번호	US-0419865 (1989-10-11)
발명자 / 주소	Lorimer D\Arcy (Santa Clara CA)
출원인 / 주소	Applied Materials, Inc. (Santa Clara CA 02)
인용정보	피인용 횟수 : 38 인용 특허 : 0

초록 ▼

A steam generator has a plurality of vertically oriented boiling chambers. Feed water enters the top chamber and cascades down through drain tubes to the lower chambers. The bottom chamber has a drain to remove excess feed water. Each chamber has a feed water reservoir in which an electrical coil causes gentle boiling. The steam produced in each chamber is substantially free of droplets and is allowed to rise to the top chamber through steam passageways. A steam outlet in the top chamber allows the steam to be released for use in semiconductor wafer cleaning systems and other applications requiring pure steam. The steam generator may be formed by stacking modular units together.

대표청구항 ▼

A steam generator comprising, a plurality of stacked, interconnected, vertically-oriented liquid-holding chambers, there being a top chamber and a bottom chamber, each chamber having a sidewall and a bottom wall, means for introducing water into the top chamber, means within the sidewall of each of said chambers above the bottom chamber for communicating overflow water from a higher chamber to a lower chamber, the bottom chamber having a drain means for removing water reaching the bottom chamber, means for heating the water in each chamber to create steam in each of said chambers, said heating means immersed in liquid in each chamber, means for conducting said steam from a lower chamber to the chambers above, the steam migrating upwardly to a collection zone, means for releasing said steam from said collection zone.

이 특허를 인용한 특허 (38) 인용/피인용 타임라인 분석

Bergman, Eric J.; Hess, Mignon P., Apparatus and method for delivering a treatment liquid and ozone to treat the surface of a workpiece.
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Bergman, Eric J.; Hess, Mignon P., Apparatus and method for processing the surface of a workpiece with ozone.
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Bergman, Eric J., Apparatus for treating a workpiece with steam and ozone.
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Amoretti, Luigi, Boiler for domestic appliances and water heating systems with steam production for home and industrial use.
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Nishijima, Masahiro; Utsumi, Takashi; Fukunaga, Takahiro, Cooking device including buffer chamber.
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Oh, Soo Young; Woo, Kyung Chul; Jeon, Si Moon; Kim, Jin Woong, Drum type washing machine and vapor generator thereof.
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Vempati, Venkata Sundereswar Rao, Energy efficient pressure less steam generator.
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Wong, Nyik Siong; Vaidhyanathan, Raveendran, Fabric treating appliance utilizing steam.
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Benne, Thomas; Michel, Claudia; Groppel, Carolyn Y.; Doll, Matthew Travis; Tubman, Casey J., Fabric treatment appliance control panel and associated steam operations.
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Beck, Markus; Pinkowski, Robert J.; Vallejo Noriega, Alvaro, Fabric treatment appliance with steam backflow device.
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Beck, Markus; Pinkowski, Robert J.; Vallejo Noriega, Alvaro; Wong, Nyik Siong; Vaidhyanathan, Raveendran, Fabric treatment appliance with steam backflow device.
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Pinkowski, Robert J.; Herkle, Christoph; Vallejo Noriega, Alvaro, Method for cleaning a steam generator.
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Herkle, Christoph; Benne, Thomas, Method for detecting abnormality in a fabric treatment appliance having a steam generator.
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Herkle, Christoph; Benne, Thomas; Pöettger, Robert; Beck, Markus, Method for operating a steam generator in a fabric treatment appliance.
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Herkle, Christoph; Benne, Thomas; Pöettger, Robert; Beck, Markus, Method for operating a steam generator in a fabric treatment appliance.
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Bergman, Eric J.; Hess, Mignon P., Method for processing the surface of a workpiece.
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Bergman, Eric J.; Hess, Mignon P., Method for treating the surface of a workpiece.
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Wong, Nyik Siong; Vaidhyanathan, Raveendran; Hardaway, Anthony H.; Luckman, Joel A., Method of sanitizing a fabric load with steam in a fabric treatment appliance.
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Bergman, Eric J., Methods for cleaning semiconductor surfaces.
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Bergman, Eric J., Methods for cleaning semiconductor surfaces.
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Bergman,Eric J., Methods of thinning a silicon wafer using HF and ozone.
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Bergman, Eric J., Process and apparatus for treating a workpiece such as a semiconductor wafer.
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Gebhart,Thomas Maximilia; Bergman,Eric J., Process and apparatus for treating a workpiece using ozone.
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Bergman,Eric J., Process and apparatus for treating a workpiece with gases.
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Das John H. ; Thakur Randhir P. S., Process for forming thin dielectric layers in semiconductor devices.
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Bergman,Eric J., Processing a workpiece using water, a base, and ozone.
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Wong, Nyik Siong; Vaidhyanathan, Raveendran; Hardaway, Anthony H.; Luckman, Joel A., Removal of scale and sludge in a steam generator of a fabric treatment appliance.
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Wong, Nyik Siong; Vaidhyanathan, Raveendran, Steam fabric treatment appliance with exhaust.
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Utsumi, Takashi; Shimoda, Hideo; Ueda, Shinya; Sakoda, Yasuhiro, Steam generating device and cooking device.
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Powell,Richard M.; Hess,Bruce W., Steam generating method and apparatus for simulation test chambers.
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Park, Seog Kyu; Ahn, In Geun, Steam generator , and laundry device and method thereof.
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Wong, Nyik Siong; Vaidhyanathan, Raveendran; Hardaway, Anthony H.; Luckman, Joel A., Steam washing machine operation method having a dual speed spin pre-wash.
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Ito,Norihiro; Kawaguchi,Hiroaki; Chouno,Yasuhiro, Substrate processing device.
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Bergman,Eric J.; Gebhart,Thomas Maximilian, System and methods for polishing a wafer.
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Naylor, Geoffrey, Vapor phase heaters.
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Quddus, Mir A.; Ghanei, Hamid; Shaha, Imtiaz S.; Hardaway, Anthony H., Washer with bio prevention cycle.
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Wong, Nyik Siong; Vaidhyanathan, Raveendran; Peng, Dengming, Water supply control for a steam generator of a fabric treatment appliance.
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Wong, Nyik Siong; Vaidhyanathan, Raveendran; Peng, Dengming, Water supply control for a steam generator of a fabric treatment appliance using a temperature sensor.
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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

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[미국특허] Steam generator 원문보기