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Steam generator

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F22B-001/28
출원번호 US-0419865 (1989-10-11)
발명자 / 주소
  • Lorimer D\Arcy (Santa Clara CA)
출원인 / 주소
  • Applied Materials, Inc. (Santa Clara CA 02)
인용정보 피인용 횟수 : 38  인용 특허 : 0

초록

A steam generator has a plurality of vertically oriented boiling chambers. Feed water enters the top chamber and cascades down through drain tubes to the lower chambers. The bottom chamber has a drain to remove excess feed water. Each chamber has a feed water reservoir in which an electrical coil ca

대표청구항

A steam generator comprising, a plurality of stacked, interconnected, vertically-oriented liquid-holding chambers, there being a top chamber and a bottom chamber, each chamber having a sidewall and a bottom wall, means for introducing water into the top chamber, means within the sidewall of each of

이 특허를 인용한 특허 (38)

  1. Bergman, Eric J.; Hess, Mignon P., Apparatus and method for delivering a treatment liquid and ozone to treat the surface of a workpiece.
  2. Bergman, Eric J.; Hess, Mignon P., Apparatus and method for processing the surface of a workpiece with ozone.
  3. Bergman, Eric J., Apparatus for treating a workpiece with steam and ozone.
  4. Amoretti, Luigi, Boiler for domestic appliances and water heating systems with steam production for home and industrial use.
  5. Nishijima, Masahiro; Utsumi, Takashi; Fukunaga, Takahiro, Cooking device including buffer chamber.
  6. Oh, Soo Young; Woo, Kyung Chul; Jeon, Si Moon; Kim, Jin Woong, Drum type washing machine and vapor generator thereof.
  7. Vempati, Venkata Sundereswar Rao, Energy efficient pressure less steam generator.
  8. Wong, Nyik Siong; Vaidhyanathan, Raveendran, Fabric treating appliance utilizing steam.
  9. Benne, Thomas; Michel, Claudia; Groppel, Carolyn Y.; Doll, Matthew Travis; Tubman, Casey J., Fabric treatment appliance control panel and associated steam operations.
  10. Beck, Markus; Pinkowski, Robert J.; Vallejo Noriega, Alvaro, Fabric treatment appliance with steam backflow device.
  11. Beck, Markus; Pinkowski, Robert J.; Vallejo Noriega, Alvaro; Wong, Nyik Siong; Vaidhyanathan, Raveendran, Fabric treatment appliance with steam backflow device.
  12. Pinkowski, Robert J.; Herkle, Christoph; Vallejo Noriega, Alvaro, Method for cleaning a steam generator.
  13. Herkle, Christoph; Benne, Thomas, Method for detecting abnormality in a fabric treatment appliance having a steam generator.
  14. Herkle, Christoph; Benne, Thomas; Pöettger, Robert; Beck, Markus, Method for operating a steam generator in a fabric treatment appliance.
  15. Herkle, Christoph; Benne, Thomas; Pöettger, Robert; Beck, Markus, Method for operating a steam generator in a fabric treatment appliance.
  16. Bergman, Eric J.; Hess, Mignon P., Method for processing the surface of a workpiece.
  17. Bergman, Eric J.; Hess, Mignon P., Method for treating the surface of a workpiece.
  18. Wong, Nyik Siong; Vaidhyanathan, Raveendran; Hardaway, Anthony H.; Luckman, Joel A., Method of sanitizing a fabric load with steam in a fabric treatment appliance.
  19. Bergman, Eric J., Methods for cleaning semiconductor surfaces.
  20. Bergman, Eric J., Methods for cleaning semiconductor surfaces.
  21. Bergman,Eric J., Methods of thinning a silicon wafer using HF and ozone.
  22. Bergman, Eric J., Process and apparatus for treating a workpiece such as a semiconductor wafer.
  23. Gebhart,Thomas Maximilia; Bergman,Eric J., Process and apparatus for treating a workpiece using ozone.
  24. Bergman,Eric J., Process and apparatus for treating a workpiece with gases.
  25. Das John H. ; Thakur Randhir P. S., Process for forming thin dielectric layers in semiconductor devices.
  26. Bergman,Eric J., Processing a workpiece using water, a base, and ozone.
  27. Wong, Nyik Siong; Vaidhyanathan, Raveendran; Hardaway, Anthony H.; Luckman, Joel A., Removal of scale and sludge in a steam generator of a fabric treatment appliance.
  28. Wong, Nyik Siong; Vaidhyanathan, Raveendran, Steam fabric treatment appliance with exhaust.
  29. Utsumi, Takashi; Shimoda, Hideo; Ueda, Shinya; Sakoda, Yasuhiro, Steam generating device and cooking device.
  30. Powell,Richard M.; Hess,Bruce W., Steam generating method and apparatus for simulation test chambers.
  31. Park, Seog Kyu; Ahn, In Geun, Steam generator , and laundry device and method thereof.
  32. Wong, Nyik Siong; Vaidhyanathan, Raveendran; Hardaway, Anthony H.; Luckman, Joel A., Steam washing machine operation method having a dual speed spin pre-wash.
  33. Ito,Norihiro; Kawaguchi,Hiroaki; Chouno,Yasuhiro, Substrate processing device.
  34. Bergman,Eric J.; Gebhart,Thomas Maximilian, System and methods for polishing a wafer.
  35. Naylor, Geoffrey, Vapor phase heaters.
  36. Quddus, Mir A.; Ghanei, Hamid; Shaha, Imtiaz S.; Hardaway, Anthony H., Washer with bio prevention cycle.
  37. Wong, Nyik Siong; Vaidhyanathan, Raveendran; Peng, Dengming, Water supply control for a steam generator of a fabric treatment appliance.
  38. Wong, Nyik Siong; Vaidhyanathan, Raveendran; Peng, Dengming, Water supply control for a steam generator of a fabric treatment appliance using a temperature sensor.
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