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Method and apparatus for forming a film 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-014/34
출원번호 US-0480131 (1990-02-14)
우선권정보 JP-0033594 (1989-02-15); JP-0156787 (1989-06-21)
발명자 / 주소
  • Miyake Kiyoshi (Katsuta JPX) Ohno Yasunori (Mito JPX) Isogai Masato (Mito JPX) Nakagawa Yukio (Daito JPX) Seki Takayoshi (Hitachi JPX) Ouhata Koukichi (Hitachi JPX) Natsui Kenichi (Hitachi JPX) Warab
출원인 / 주소
  • Hitachi, Ltd. (Tokyo JPX 03)
인용정보 피인용 횟수 : 44  인용 특허 : 0

초록

This invention relates to a method and an apparatus for forming a film, which are suitable for forming a film of a semiconductor, dielectric, metal, insulator, or organic substance. In order to form a film of high purity and quality at high speed, a particle beam such as an ion beam, an electron bea

대표청구항

A method of forming a film, comprising the steps of: applying a particle beam to a material substance bonded by either van der Waals forces or hydrogen bonding forces, so as to sputter particles from said material substance, thereby producing particles from the material substance by sputtering; appl

이 특허를 인용한 특허 (44)

  1. Jenson, Mark L.; Klaassen, Jody J.; Sullivan, Jim, Active wireless tagging system on peel and stick substrate.
  2. Yudovsky Joseph ; Tsai Kenneth ; Ghanayem Steve ; Sherstinsky Semyon, Apparatus and method for delivering a gas.
  3. Shakespeare,Stuart, Apparatus and method for depositing material onto a substrate using a roll-to-roll mask.
  4. Voutsas, Apostolos, Apparatus to control the amount of oxygen incorporated into polycrystalline silicon film during excimer laser processing of silicon films.
  5. Jacobs, Harlan T.; Jenson, Mark L.; Klaassen, Jody J.; Yan, Jenn-Feng, Battery-operated wireless-communication apparatus and method.
  6. Jacobs, Harlan T.; Jenson, Mark L.; Klassen, Jody J.; Yan, Jenn-Feng, Battery-operated wireless-communication apparatus and method.
  7. Jacobs,Harlan Theodore; Jenson,Mark Lynn; Klaassen,Jody Jon; Yan,Jenn Feng, Battery-operated wireless-communication apparatus and method.
  8. Chandler, Clive; Smith, Noel, Charged particle-beam processing using a cluster source.
  9. Arora, Pramod K.; Singh, Brij P., Composition with film forming alkylsilsesquioxane polymer and method for applying hydrophobic films to surfaces.
  10. Jenson,Mark Lynn, Continuous processing of thin-film batteries and like devices.
  11. Jenson,Mark Lynn; Klaassen,Jody Jon; Weiss,Victor Henry; Yan,Jenn Feng, Device enclosures and devices with integrated battery.
  12. Sago,Yasumi; Ogahara,Yoneichi; Miyamae,Masanori, Insulation-film etching system.
  13. Tarnowski,Dave J.; Jenson,Mark L., Layered barrier structure having one or more definable layers and method.
  14. Klaassen,Jody J., Lithium/air batteries with LiPON as separator and protective barrier and method.
  15. Klaassen,Jody J., Lithium/air batteries with LiPON as separator and protective barrier and method.
  16. Jenson, Mark L., Low-temperature fabrication of thin-film energy-storage devices.
  17. Jenson, Mark L.; Klaassen, Jody J., Method and apparatus for integrated-circuit battery devices.
  18. Jenson, Mark L.; Klaassen, Jody J., Method and apparatus for integrated-circuit battery devices.
  19. Takahashi Migaku,JPX ; Yokoyama Katsuya,JPX ; Yamada Jun,JPX ; Shiba Takashi,JPX, Method and apparatus for preparing crystal thin films by using a surface acoustic wave.
  20. Jenson,Mark L.; Weiss,Victor H., Method and apparatus for thin-film battery having ultra-thin electrolyte.
  21. Hihara, Takehiko; Sumiyama, Kenji; Katoh, Ryoji, Method and device for manufacturing semiconductor or insulator-metallic laminar composite cluster.
  22. Jenson, Mark Lynn, Method of continuous processing of thin-film batteries and like devices.
  23. Kiuchi Masato,JPX ; Chayahara Akiyoshi,JPX, Method of forming transparent and conductive ultrathin films.
  24. Kato Naoki,JPX ; Sekura Rieko,JPX ; Iwaki Tadao,JPX, Method of introducing slightly titlting homeotropic orientation into liquid crystal, liquid crystal electro-optical devi.
  25. Leiphart Shane P. (Boise ID), Method of sputter deposition.
  26. Leiphart Shane P., Methods of sputter depositing of metals onto substrates, and methods of forming plasma.
  27. Eugene P. Marsh, Organic field ionization source.
  28. Marsh Eugene P., Organic field ionization source.
  29. Azuma Junzou,JPX ; Shimase Akira,JPX ; Hamamura Yuichi,JPX ; Koike Hidemi,JPX, Pattern forming method using charged particle beam process and charged particle beam processing system.
  30. Junzou Azuma JP; Akira Shimase JP; Yuichi Hamamura JP; Hidemi Koike JP, Pattern forming method using charged particle beam process and charged particle beam processing system.
  31. Rene Winand BE; Stephane Lucas BE; Pierre Vanden Brande BE; Alain Weymeersch BE; Lucien Renard BE, Process of depositing a coating onto a substrate by reactive sputtering.
  32. Arora, Pramod K.; Singh, Brij P., Product for vapor deposition of films of amphiphilic molecules or polymers.
  33. Read, John B.; Sweeney, Daniel C., Rugged, gel-free, lithium-free, high energy density solid-state electrochemical energy storage devices.
  34. Sweeney, Daniel C.; Read, John B., Rugged, gel-free, lithium-free, high energy density solid-state electrochemical energy storage devices.
  35. Jenson,Mark L.; Klaassen,Jody J.; Sullivan,Jim; Lemaire,Charles A.; Billion,Richard E., Solid state MEMS activity-activated battery device and method.
  36. Jenson, Mark L.; Klaassen, Jody J.; Sullivan, Jim; Lemaire, Charles A.; Billion, Richard E., Solid state activity-activated battery device and method.
  37. David Alan Baldwin ; Todd Lanier Hylton, System and method for performing sputter deposition using independent ion and electron sources and a target biased with an a-symmetric bi-polar DC pulse signal.
  38. Baldwin, David Alan; Hylton, Todd Lanier, System and method for performing sputter deposition with multiple targets using independent ion and electron sources and independent target biasing with DC pulse signals.
  39. Klaassen, Jody J., Thin-film batteries with polymer and LiPON electrolyte layers and method.
  40. Jenson,Mark L., Thin-film battery devices and apparatus for making the same.
  41. Jenson,Mark Lynn; Weiss,Victor Henry, Thin-film battery having ultra-thin electrolyte.
  42. Jenson,Mark Lynn; Weiss,Victor Henry, Thin-film battery having ultra-thin electrolyte and associated method.
  43. Michael D. Perry ; Paul S. Banks ; Brent C. Stuart, Ultrashort pulse laser deposition of thin films.
  44. Vaccaro,Christopher M.; Lilienthal,David A., Ultrasonic inspection reference standard for composite Materials.
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