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NTIS 바로가기국가/구분 | United States(US) Patent 등록 |
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국제특허분류(IPC7판) |
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출원번호 | US-0343344 (1989-04-26) |
우선권정보 | JP-0132650 (1985-06-18); JP-0166145 (1985-07-27); JP-0178777 (1985-08-14); JP-0198730 (1985-09-07); JP-0208284 (1985-09-19); JP-0297489 (1985-12-30); JP-0034048 (1986-02-17); JP-0091652 (1986-04-21); JP-0108 |
발명자 / 주소 |
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인용정보 | 피인용 횟수 : 36 인용 특허 : 0 |
A non-contact conveying device for lifting and/or supporting wafer-like articles without physical contact with the articles. The device has a pickup head with a cuhsion-vacuum room fully opened at its bottom and has an ejector opening located at the center of its upper wall and communicating with th
A pick-up head for a non-contact conveying device, said pick-up head comprising: an upper wall; a side wall surrounding said upper wall; an operating surface formed at a lower annular edge of said side wall, said operating surface being positionable adjacent an article to be lifted; mans for providi
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