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NTIS 바로가기국가/구분 | United States(US) Patent 등록 |
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국제특허분류(IPC7판) |
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출원번호 | US-0579521 (1990-09-10) |
우선권정보 | JP-0251606 (1989-09-26); JP-0006029 (1990-01-15) |
발명자 / 주소 |
|
출원인 / 주소 |
|
인용정보 | 피인용 횟수 : 26 인용 특허 : 0 |
A mass flow controller having a bypass portion provided in a body through which a large amount of gas is passed and a sensor portion, laid between a primary chamber which is an inlet of the bypass portion and a secondary chamber which is an outlet of the bypass portion, through which gas flows at a
A mass flow controller having a bypass portion through which a large amount of gas is passed and a sensor portion through which gas flows at a small flow rate proportional to the flow rate of the gas passed through said bypass portion and capable of measuring the total flow rate of gas by measuring
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