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Diamond films and method of growing diamond films on nondiamond substrates 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-016/18
  • C23C-016/46
  • C23C-016/48
  • C23C-016/50
출원번호 US-0442121 (1989-11-28)
발명자 / 주소
  • Kirkpatrick Allen R. (Lexington MA)
출원인 / 주소
  • Epion Corporation (Bedford MA 02)
인용정보 피인용 횟수 : 95  인용 특허 : 0

초록 ▼

A method of forming a polycrystalline film, such as a diamond, on a foreign substrate involves preparing the substrate before film deposition to define discrete nucleation sites. The substrate is prepared for film deposition by forming a pattern of irregularities in the surface thereof. The irregula

대표청구항 ▼

A method of forming a diamond film on a nondiamond substrate, comprising the steps of: preparing a surface of a substrate for diamond film deposition by introducing to the surface of the substrate a plurality of minute surface irregularities in a predetermined pattern; applying at least one diamond

이 특허를 인용한 특허 (95)

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