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NTIS 바로가기국가/구분 | United States(US) Patent 등록 |
---|---|
국제특허분류(IPC7판) |
|
출원번호 | US-0344652 (1989-04-27) |
우선권정보 | JP-0108117 (1988-04-30) |
발명자 / 주소 |
|
출원인 / 주소 |
|
인용정보 | 피인용 횟수 : 7 인용 특허 : 0 |
A composite vacuum pump system having first and second vacuum pumps each having its own rotor and drive motor in which the exhaust of the first vacuum pump is removably coupled to the inlet of the second vacuum pump and the first vacuum pump rotor is driven at a constant torque and in which the seco
A composite vacuum pump comprising: a first vacuum pump having a first drive means and a first rotor means driven by said first drive contained within a housing means; said housing means having gas inlet and gas outlet means; a second vacuum pump having a second drive means and a second rotor means
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