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Vapor washing process and apparatus 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F26B-007/00
출원번호 US-0230155 (1988-08-09)
우선권정보 JP-0199769 (1987-08-12); JP-0201736 (1987-08-14)
발명자 / 주소
  • Kurokawa Hideaki (Hitachi JPX) Ebara Katsuya (Mito JPX) Takahashi Sankichi (Hitachi JPX) Matsuzaki Harumi (Hitachi JPX) Yoda Hiroaki (Tsuchiura JPX) Nitta Takahisa (Fuchu JPX) kouchi Isao (Hitachi JP
출원인 / 주소
  • Hitachi, Ltd. (Tokyo JPX 03)
인용정보 피인용 횟수 : 98  인용 특허 : 0

초록

Vapor is separated from mist accompanying the vapor by passing the vapor through a porous membrane. The vapor having passed through the membrane is brought into contact with an object to be washed and condenses thereon, whereby the object is washed.

대표청구항

A process of washing an object to be treated with vapor, wherein the improvement comprises the steps of: removing mist accompanying the vapor by a porous membrane; contacting the vapor with the object to be treated and condensing the vapor thereon; and then separating the condensed vapor from the ob

이 특허를 인용한 특허 (98)

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