$\require{mediawiki-texvc}$
  • 검색어에 아래의 연산자를 사용하시면 더 정확한 검색결과를 얻을 수 있습니다.
  • 검색연산자
검색연산자 기능 검색시 예
() 우선순위가 가장 높은 연산자 예1) (나노 (기계 | machine))
공백 두 개의 검색어(식)을 모두 포함하고 있는 문서 검색 예1) (나노 기계)
예2) 나노 장영실
| 두 개의 검색어(식) 중 하나 이상 포함하고 있는 문서 검색 예1) (줄기세포 | 면역)
예2) 줄기세포 | 장영실
! NOT 이후에 있는 검색어가 포함된 문서는 제외 예1) (황금 !백금)
예2) !image
* 검색어의 *란에 0개 이상의 임의의 문자가 포함된 문서 검색 예) semi*
"" 따옴표 내의 구문과 완전히 일치하는 문서만 검색 예) "Transform and Quantization"

특허 상세정보

Ultra-high efficiency porous metal filter

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B01D-046/12    B01D-039/20   
미국특허분류(USC) 55/485 ; 55/482 ; 55/523 ; 210/5101
출원번호 US-0665963 (1991-03-12)
발명자 / 주소
출원인 / 주소
인용정보 피인용 횟수 : 46  인용 특허 : 0
초록

An ultra-high efficiency particulate air filter for use in the microelectronics manufacturing industry is formed as a fully homogeneous sintered metal filter that exhibits an efficiency substantially in excess of a 6 log reduction and preferably equal to or exceeding a 9 log reduction (an efficiency of 99.9999999%). The filter can be used as a process gas in-line filter in state of the art gas supply systems. The porous metal filter exhibits long term stability relative to mechanical or thermal stress and operates within the desired ultra-high efficiency...

대표
청구항

An ultra-high efficiency particulate air filter for use in filtering process gases for the semiconductor and microelectronics manufacturing industries comprising a filter element made from porous sintered metal, said element having a filtration efficiency relative to its most penetrating particle size of at least 6 log reduction and a specific surface per unit area of at least 0.055 m2/cm2 when standardized to a thickness of 0.068 inch, said filtration efficiency being measured at a flow rate of 30 SLPM for an 11.3 in.2 filter area.

이 특허를 인용한 특허 피인용횟수: 46

  1. Lahti, Thomas Don; Ihde, Jeffery Ray; Rappl, James Francis. Auxiliary shielding gas filter for a welding apparatus. USP2016119505076.
  2. Muller,Jason William; Poon,Wai Sing. Composite filter media. USP2009037501003.
  3. Jha, Sunil C.; Rubow, Kenneth L.; Cowan, Cathy L.; Eisenmann, Mark R.. Composite porous media. USP2004046719947.
  4. Jha,Sunil C.; Rubow,Kenneth L.; Cowan,Cathy L.; Eisenmann,Mark R.. Composite porous media. USP2006097112234.
  5. Eisenmann Mark R. ; Westfall David P.. Cup-shaped porous metal ultra-high efficiency filter and method of making same. USP1999085937263.
  6. Braun David Lloyd ; Lira Ricardo. Diffusional gas transfer system and method of using same. USP2001066248153.
  7. Braun David L. ; Lira Ricardo. Diffusional gas transfer system and method using same. USP1999115976220.
  8. Otsuka Kenji,JPX ; Waki Hiroshi,JPX ; Yamashita Yoshio,JPX ; Arakawa Satoshi,JPX ; Hatakeyama Toshiya,JPX. Dust removing apparatus and dust removing method. USP1999045895521.
  9. Handley, Michael W.; Brandenhoff, Mark; Patel, Kirit; Sporre, Timothy D.. Filter construction for use with air in-take for gas turbine and methods. USP2014058721756.
  10. James A. Gill. Filter element with porous nickel-based alloy substrate and metal oxide membrane. USP2002086432308.
  11. McGee, Phillip; Kochie, Robert; Ribeiro, Durval S.. Filter for a gas analyzer. USP2004126827763.
  12. Mudd, Daniel T.; Mudd, Patti J.. Flow control system, method, and apparatus. USP2018059958302.
  13. White, William W.; White, William H.; Davis, Christopher B.; Smith, Nelson D.. Fluid flow controller and method of operation. USP2003046539968.
  14. Balazy Richard D. ; Cowan Cathy L. ; Eisenmann Mark R. ; Frink Kenneth E. ; Kulha Edward. Fluid flow controlling. USP2000116152162.
  15. Balazy, Richard D.; Cowan, Cathy L.; Eisenmann, Mark R.; Frink, Kenneth E.; Kulha, Edward. Fluid flow controlling. USP2004106802333.
  16. Richard D. Balazy ; Cathy L. Cowan ; Mark R. Eisenmann ; Kenneth E. Frink ; Edward Kulha. Fluid flow controlling. USP2002076422256.
  17. Daniel T. Mudd. Fluid mass flow control valve and method of operation. USP2002096443174.
  18. Iraneta, Pamela C.; Belanger, Jon; Fisk, Raymond P.. Frit for high pressure liquid chromatography. USP2015048999156.
  19. Arquin, Pierre J.; Lindahl, Nels W.; Canaan, Mark A.. Gas purification system with an integrated hydrogen sorption and filter assembly. USP2005056890376.
  20. Arquin, Pierre J.; Lindahl, Nels W.; Canaan, Mark A.. Gas purification system with an integrated hydrogen sorption and filter assembly. USP2004056733571.
  21. Pereira, Stenio da Costa; Shogren, Peter K.; Gipson, Rocky D.. High purity gas purifier. USP20181210159927.
  22. Zeller Robert S.. High-efficiency metal membrane element, filter, and process for making. USP199907RE36249.
  23. Peterson, Michael D.; Popish, Darold M.; Wickland, Terry J.; Washburn, Craig. In-line HEPA filter. USP2005066911061.
  24. Eisenmann Mark R. ; Balazy Richard D.. Inline ultra-high efficiency filter. USP1999065917066.
  25. Vroman,Christopher J.; Abbott,Nathan. Membrane and reticle-pellicle apparatus with purged pellicle-to-reticle gap using same. USP2006057052809.
  26. Hideomi Ishibe JP. Metal filter. USP2002036355082.
  27. Murphy William L. ; Wilson Bruce A.. Method for forming a reactive medium. USP1998115829139.
  28. Shimura Hirofumi (Tsukuba JPX) Sasaki Shinya (Tsukuba JPX) Enomoto Yuji (Tsukuba JPX). Method for producing carbon allotrope. USP1993125271890.
  29. Doubrava, Jeffrey; Gallegos, Anthony; Lundquist, Eric G.; Bohling, James C.; Staniunas, Richard F.. Method for recovering catalytic metals using a porous metal filter. USP2004086773485.
  30. Koehler Paul C. ; Geibel Stephen A. ; Whitlock Michael B. ; Hashemi Reza ; Malbrel Christophe A.. Method of repairing a damaged well. USP1999065909773.
  31. Herrmann Robert C. ; Landin Steven M.. Micro and ultrafilters with controlled pore sizes and pore size distribution and methods for making. USP2001106309546.
  32. R?thig, Thomas. Module for use as a filter, catalytic converter, or heater, and method for the manufacture thereof. USP2005036863706.
  33. Gebert, Richard; Poon, Wai Sing; Stark, Steve. Multiple layer filter media. USP2012048147583.
  34. Park, Jong Soo; Yoon, Wang Lai; Lee, Ho Tae; Kim, Dong Won; Cho, Sung Ho; Ryi, Shin Kun; Choi, Seung Hoon. Porous hydrogen separation membrane and method for preparing the same. USP2009047524361.
  35. Murphy William L. ; Wilson Bruce A.. Reactive medium for purifying fluids. USP2000056066591.
  36. Somani, Bhushan. Real time diagnostics for flow controller systems and methods. USP20180810054959.
  37. Li, Yonquan; Glenn, Daniel E.; Johnson, Jr., K. Stephen; Kita, Dieter. Sample line management in a fluid analyzer system. USP2016069366607.
  38. Piechowski, Gerald P.; Christopher, Mark R.. Shielding gas filter for welding apparatus. USP2004106809286.
  39. Burgess, Derek; White, Wayne F.; Romano, Alfred M.; Pflugbeil, Todd W.; Balazy, Richard D.; Rubow, Kenneth L.; Rosenberger, John E.. Sintered fiber filter. USP2016049308584.
  40. Burgess, Derek; White, Wayne F.; Romano, Alfred M.; Pflugbeil, Todd W.; Balazy, Richard D.; Rubow, Kenneth L.; Rosenberger, John E.. Sintered fiber filter. USP2012018097071.
  41. Burgess, Derek; White, Wayne F.; Romano, Alfred M.; Pflugbeil, Todd W.; Balazy, Richard D.; Rubow, Kenneth L.; Rosenberger, John E.. Sintered fiber filter. USP2014038673065.
  42. Zeller, Robert S.. Sintered porous material comprising particles of different average sizes. USP2015018932381.
  43. Mudd, Daniel T.. Small internal volume fluid mass flow control apparatus. USP2003056561218.
  44. Moore,Scott E.. System for filling openings in semiconductor products. USP2006077070659.
  45. Shajii,Ali; Meneghini,Paul; Smith,Daniel Alexander. Thermal mass flow rate sensor having fixed bypass ratio. USP2006107121139.
  46. Phillips Terrance D.. Water washable stainless steel HEPA filter. USP2001036200367.