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Process for self aligning a source region with a field oxide region and a polysilicon gate 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/76
출원번호 US-0621284 (1990-11-29)
발명자 / 주소
  • Tang Daniel N. (San Jose CA) Lu Wen-Juei (Sunnyvale CA)
출원인 / 주소
  • Intel Corporation (Santa Clara CA 02)
인용정보 피인용 횟수 : 50  인용 특허 : 0

초록

A method and apparatus for self-aligning a source region with a field oxide region and a polysilicon gate and word line in a semiconductor device. This method and apparatus allows reduced memory cell size and improved device density by substantially eliminating the bird\s beak encroachment and corne

대표청구항

In a semiconductor device having a silicon substrate, a method of forming source regions in said silicon substrate said source regions self-aligned with polysilicon regions and field oxide regions, said method comprising: a) forming continuous substantially parallel field oxide regions on said silic

이 특허를 인용한 특허 (50)

  1. Tuan, Hsing Ti; Leung, Chung Wai, Dummy structures that protect circuit elements during polishing.
  2. Tuan, Hsing Ti; Leung, Chung Wai, Dummy structures that protect circuit elements during polishing.
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  14. Lee, Wook-Hyoung, Memory device and method of manufacturing the same.
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  17. Han,Chang Hun, Method for fabricating semiconductor device by forming trenches in different depths at a cellregion and a peripheral region for reducing self aligned source resistance at the cell region.
  18. Hsieh Chia-Ta,TWX ; Lin Chrong Jung,TWX ; Chen Shui-Hung,TWX ; Kuo Di-Son,TWX, Method for forming mirror image split gate flash memory devices by forming a central source line slot.
  19. Choi Yong-ju,KRX ; Choi Jeong-hyuk,KRX, Method for manufacturing nonvolatile memory device capable of preventing damage to side walls of stacked gate and active region.
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  46. Ratnam Perumal, Technique to improve the source leakage of flash EPROM cells during source erase.
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