[특허]Method and apparatus for inspecting surface conditions

Method and apparatus for inspecting surface conditions 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G01N-021/88
출원번호	US-0669998 (1991-03-15)
우선권정보	JP-0067839 (1990-03-16)
발명자 / 주소	Okada Saburo (Kure JPX) Sumimoto Tetsuhiro (Kure JPX) Imade Masaaki (Kure JPX) Miyauchi Hidekazu (Kure JPX)
출원인 / 주소	Agency of Industrial Science & Technology (Tokyo JPX 07)
인용정보	피인용 횟수 : 58 인용 특허 : 0

초록 ▼

This invention concerns inspection of surface conditions to detect locations, sizes and nature of flaws, defects or stains not only on a flat surface but also on an undulating or stepped surface, and includes the steps of: scanning an inspecting surface of a specimen with a spot-like laser beam projected obliquely from a light source; detecting the height of the inspecting surface from a reflected image of the scanning light picked up by a TV camera located above the inspecting surface, to maintain the inspecting surface at a constant height; converging reflected and diffracted light from the inspecting surface toward a photo-detector having measuring points at the point of convergence and at a number of positions along a concentric circle around the point of convergence; measuring the energy of the reflected and diffracted light by photoelectric transducers connected to the respective measuring points; and displaying locations, sizes and nature of surface flaws, defects and stains of the specimen on a monitor, with combined use of information provided by the picture image of the TV camera as to variations in surface level and cracks on the inspecting surface.

대표청구항 ▼

A method for inspection of surface conditions by scanning a surface area of a specimen with a spot-like light beam projected obliquely from a light source and detecting various defects on the surface of said specimen on the basis of optical data of diffracted light from said specimen surface, characterized in that said method comprises: detecting the height of said inspecting surface from a reflection position of the scanning light spot picked up by a TV camera located above said inspecting surface; controlling the vertical position of said specimen according to the output of the height detection in such a manner as to maintain said inspecting surface of said specimen at a constant height; converging reflected and diffracted light from said inspecting surface by means of a parabolic cylinder mirror toward a photo-detector having measuring points at the point of convergence of said mirror and in a number of positions on and along a concentric circle around said point of convergence; measuring the energy of reflected and diffracted light by photoelectric transducers connected to said measuring points; and displaying display data corresponding to data received by the TV camera and the photoelectric transducers on a display, thereby displaying locations, sizes and nature of surface flaws, defects and stains of said specimen.

이 특허를 인용한 특허 (58)

Xu,James J.; Lee,Ken K., Defect review system with 2D scanning and a ring detector.
상세보기
Meeks, Steven W., Detecting and classifying surface features or defects by controlling the angle of the illumination plane of incidence with respect to the feature or defect.
상세보기
Almogy Gilad,ILX, Dual resolution combined laser spot scanning and area imaging inspection.
상세보기
Watanabe,Masahiro; Hiroi,Takashi; Tanaka,Maki; Shinada,Hiroyuki; Usami,Yasutsugu, Electron beam apparatus and method with surface height calculator and a dual projection optical unit.
상세보기
Watanabe, Masahiro; Hiroi, Takashi; Tanaka, Maki; Shinada, Hiroyuki; Usami, Yasutsugu, Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus.
상세보기
Watanabe, Masahiro; Hiroi, Takashi; Tanaka, Maki; Shinada, Hiroyuki; Usami, Yasutsugu, Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus.
상세보기
Watanabe, Masahiro; Hiroi, Takashi; Tanaka, Maki; Shinada, Hiroyuki; Usami, Yasutsugu, Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus.
상세보기
Vaez Iravani,Mehdi; Zhao,Guoheng; Stokowski,Stanley E., Illumination apparatus and methods.
상세보기
Meeks, Steven W., Material independent profiler.
상세보기
Stevick, Glen R.; Rondinone, David M.; Singer, Jerome R.; Rocklin, Matthew D., Method and apparatus for dynamic space-time imaging system.
상세보기
Zelt ; III Albert R. ; Klawonn Robert M. ; Laskey Paul S., Method and apparatus for monitoring and inspecting strip edge.
상세보기
Drent, William Van; Vajda, Ferenc, Method and system for perpendicular magnetic media metrology.
상세보기
John C. Stover ; Yuri A. Eremin RU, Method for discriminating between holes in and particles on a film covering a substrate.
상세보기
Imaino Wayne Isami ; Juliana ; Jr. Anthony ; Latta Milton Russell ; Lee Charles H. ; Leung Wai Cheung ; Rosen Hal J. ; Brannon James Hammond, Method of producing a calibration disk.
상세보기
Frederick G. Hewitt ; Steven J. Orfield, Methods for assessing visual tasks to establish desirable lighting and viewing conditions for performance of tasks, apparatus; and, applications.
상세보기
Hewitt Frederick G. (Eagan MN) Orfield Steven J. (Minneapolis MN), Methods for assessing visual tasks to establish desirable lighting and viewing conditions for performance of tasks; appa.
상세보기
Grow Robert J. ; Grow Richard W. ; Benner Robert E., Non-contact shape meter for flatness measurements.
상세보기
Leslie, Brian C.; Nikoonahad, Mehrdad; Wells, Keith B., Optical scanning system for surface inspection.
상세보기
Leslie,Brian C.; Nikoonahad,Mehrdad; Wells,Keith B., Optical scanning system for surface inspection.
상세보기
Leslie,Brian C.; Nikoonahad,Mehrdad; Wells,Keith B., Optical scanning system for surface inspection.
상세보기
Marxer,Norbert; Gross,Kenneth P.; Altendorfer,Hubert; Kren,George, Process and assembly for non-destructive surface inspections.
상세보기
Marxer,Norbert; Gross,Kenneth P.; Altendorfer,Hubert; Kren,George, Process and assembly for non-destructive surface inspections.
상세보기
Mehdi Vaez-Iravani ; Stanley Stokowski ; Guoheng Zhao, Sample inspection system.
상세보기
Vaez Iravani,Mehdi; Stokowski,Stanley; Zhao,Guoheng, Sample inspection system.
상세보기
Vaez Iravani,Mehdi; Stokowski,Stanley; Zhao,Guoheng, Sample inspection system.
상세보기
Vaez Iravani,Mehdi; Stokowski,Stanley; Zhao,Guoheng, Sample inspection system.
상세보기
Vaez-Iravani, Mehdi; Stokowski, Stanley; Zhao, Guoheng, Sample inspection system.
상세보기
Vaez-Iravani, Mehdi; Stokowski, Stanley; Zhao, Guoheng, Sample inspection system.
상세보기
Vaez-Iravani, Mehdi; Stokowski, Stanley; Zhao, Guoheng, Sample inspection system.
상세보기
Vaez-Iravani, Mehdi; Stokowski, Stanley; Zhao, Guoheng, Sample inspection system.
상세보기
Nikoonahad, Mehrdad; Stokowski, Stanley E., Scanning system for inspecting anamolies on surfaces.
상세보기
Nikoonahad,Mehrdad; Stokowski,Stanley E., Scanning system for inspecting anomalies on surfaces.
상세보기
Ngo, Klet; Reeve, Michael; Martinez, Erica Christina, Sensor device with a radiation directing surface.
상세보기
Zaman,Kamran; Pietrantoni,Dante; Gottschalk,Ken; Pietrzykowski,Stanley, Specular surface flaw detection.
상세보기
Meeks, Steven W.; Sappey, Romain; Carr, Tom, Surface characteristic analysis.
상세보기
Oak, Dave S.; Do, Tri; Soetarman, Ronny; Meeks, Steven W.; Velidandla, Vamsi, Surface finish roughness measurement.
상세보기
Xu,James J.; Lee,Ken K., Surface inspection system.
상세보기
Clementi Lee D. ; Fossey Michael E., Surface inspection system and method of inspecting surface of workpiece.
상세보기
Imaino Wayne Isami ; Juliana ; Jr. Anthony ; Latta Milton Russell ; Lee Charles H. ; Leung Wai Cheung ; Rosen Hal J., Surface inspection tool.
상세보기
Imaino Wayne Isami ; Juliana ; Jr. Anthony ; Latta Milton Russell ; Lee Charles H. ; Leung Wai Cheung ; Rosen Hal J., Surface inspection tool.
상세보기
Imaino Wayne Isami ; Juliana ; Jr. Anthony ; Latta Milton Russell ; Lee Charles H. ; Leung Wai Cheung ; Rosen Hal J., Surface inspection tool.
상세보기
Imaino Wayne Isami ; Juliana ; Jr. Anthony ; Latta Milton Russell ; Lee Charles H. ; Leung Wai Cheung ; Rosen Hal J., Surface inspection tool.
상세보기
Imaino, Wayne Isami; Juliana, Anthony; Latta, Milton Russell; Lee, Charles H.; Leung, Wai Cheung; Rosen, Hal J.; Meeks, Steven; Sonningfeld, Richard, Surface inspection tool.
상세보기
Imaino, Wayne Isami; Juliana, Jr., Anthony; Latta, Milton Russell; Lee, Charles H.; Leung, Wai Cheung; Rosen, Hal J.; Meeks, Steven; Sonningfeld, Richard, Surface inspection tool.
상세보기
Imaino Wayne Isami ; Latta Milton Russell, Surface inspection tool using reflected and scattered light.
상세보기
Mehanian,Courosh; Meeks,Steven W.; Rosengaus,Eliezer, Surface scanning.
상세보기
Wurz, Albert; Romaine, John E.; Martin, David L., System for dimensioning objects using at least one light beam offset relative to a perpendicular from an object supporting surface.
상세보기
Biellak,Steve; Stokowski,Stanley E.; Vaez Iravani,Mehdi, Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illumination.
상세보기
Almogy, Gilad; Mazaki, Hadar; Phillip, Zvi Howard; Reinhorn, Silviu; Goldberg, Boris; Some, Daniel I., Variable angle illumination wafer inspection system.
상세보기
Meeks, Steven W.; Kudinar, Rusmin, Wafer edge inspection.
상세보기
Meeks, Steven W.; Kudinar, Rusmin; Wheeler, William R.; Nguyen, Hung Phi; Velidandla, Vamsi; Somanchi, Anoop; Soetarman, Ronny, Wafer edge inspection.
상세보기
Meeks,Steven W.; Kudinar,Rusmin; Wheeler,William R.; Nguyen,Hung Phi, Wafer edge inspection.
상세보기
Velidandla,Vamsi; Somanchi,Anoop; Soetarman,Ronny; Meeks,Steven W., Wafer edge inspection.
상세보기
Fossey Michael E. ; Stover John C., Wafer inspection system for distinguishing pits and particles.
상세보기
Fossey Michael E. ; Stover John C. ; Clementi Lee D., Wafer inspection system for distinguishing pits and particles.
상세보기
Fossey, Michael E.; Stover, John C.; Clementi, Lee D., Wafer inspection system for distinguishing pits and particles.
상세보기
Stanke, Fred E.; Carlisle, Clinton B.; Pham, Hung Van; Tong, Edric; Ruth, Douglas E.; Cahill, Jr., James M.; Weber-Grabau, Michael; Burke, Elliot; Norton, Adam E., Wafer metrology apparatus and method.
상세보기
Stanke, Fred E.; Carlisle, Clinton B.; Pham, Hung; Tong, Edric; Ruth, Douglas E.; Cahill, James M.; Weber, Michael; Burke, Elliot, Wafer metrology apparatus and method.
상세보기

IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

내보내기 구분	파일저장 인쇄 메일전송
구성항목	기본정보 상세정보 관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표IPC 관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 공고번호, 공고일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표출원인, 출원인국적, 출원인주소, 발명자, 발명자E, 발명자코드, 발명자주소, 발명자 우편번호, 발명자국적, 대표IPC, IPC코드, 요약, 미국특허분류, 대리인주소, 대리인코드, 대리인(한글), 대리인(영문), 국제공개일자, 국제공개번호, 국제출원일자, 국제출원번호, 우선권, 우선권주장일, 우선권국가, 우선권출원번호, 원출원일자, 원출원번호, 지정국, Citing Patents, Cited Patents
저장형식	Text(ASCII format) Excel format PIAS분석(.xls)
메일정보	받는사람 (필수) @ 보내는사람 (선택) @ 제목 내용 KISTI 검색결과 이메일 서비스
안내	총 건의 자료가 검색되었습니다. 다운받으실 자료의 인덱스를 입력하세요. (1-10,000) 검색결과의 순서대로 최대 10,000건 까지 다운로드가 가능합니다. 데이타가 많을 경우 속도가 느려질 수 있습니다.(최대 2~3분 소요) 다운로드 파일은 UTF-8 형태로 저장됩니다. 파일의 내용이 제대로 보이지 않을실 때는 웹브라우저 상단의 보기 -> 인코딩 -> 자동선택 여부를 확인하십시오. ~ Text(ASCII format) Excel format

연합인증

Method and apparatus for inspecting surface conditions 원문보기

초록 ▼

대표청구항 ▼

연구과제 타임라인

이 특허를 인용한 특허 (58)

관련 콘텐츠

특허 원문 보기

IPC 상위 출원인

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

선택된 텍스트

연합인증

Method and apparatus for inspecting surface conditions 원문보기

초록 ▼

대표청구항 ▼

연구과제 타임라인

전체(0) 논문(0) 특허(0) 보고서(0)

전체(0) 논문(0) 특허(0) 보고서(0)

이 특허를 인용한 특허 (58)

관련 콘텐츠

특허 원문 보기

IPC 상위 출원인

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

선택된 텍스트