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Apparatus for producing czochralski-grown single crystals 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B01D-009/00
출원번호 US-0677172 (1991-03-29)
우선권정보 JP-0086989 (1990-03-30); JP-0095871 (1990-04-11)
발명자 / 주소
  • Yamagishi Hirotoshi (Annaka JPX) Mizuishi Kouji (Annaka JPX) Hasegawa Fumihiko (Urawa JPX)
출원인 / 주소
  • Shin-Etsu Handotai Co., Ltd. (Tokyo JPX 03)
인용정보 피인용 횟수 : 38  인용 특허 : 0

초록

An apparatus for producing a single crystal ingot grown by the Czochralski method includes a plurality of grip arms each having a grip finger engageable with a downwardly facing engagement step formed on an upper part of the single crystal, and a ring slidably fitted around a plurality of grip arms

대표청구항

An apparatus for producing a single crystal ingot grown from a seed crystal by Czochralski method, comprising: means for forming a large-diameter head and a small-diameter neck in succession so as to provide a downwardly facing engagement step on an upper part of a single crystal ingot to be grown f

이 특허를 인용한 특허 (38)

  1. Tomioka Junsuke,JPX ; Inagaki Hiroshi,JPX ; Suda Ayumi,JPX ; Kubota Toshimichi,JPX, Apparatus and method for lifting single crystals.
  2. Kurosaka Shoei,JPX ; Inagaki Hiroshi,JPX ; Kawashima Shigeki,JPX ; Tomioka Junsuke,JPX, Apparatus and method for pulling up single crystals.
  3. Hiraishi Yoshinobu,JPX ; Kawabata Mitsunori,JPX ; Kurosaka Shoei,JPX ; Inagaki Hiroshi,JPX, Apparatus for pulling up crystal bodies.
  4. Inagaki Hiroshi,JPX ; Ishikawa Fumitaka,JPX, Apparatus of pulling up single crystals.
  5. Cherko Carl F., Cable assembly for crystal puller.
  6. Schulman Winfried,DEX ; Kaiser Helmut,DEX ; Thimm Franz,DEX, Crystal holder.
  7. Iida Makoto,JPX ; Iino Eiichi,JPX ; Kimura Masanori,JPX ; Muraoka Shozo,JPX, Crystal holding apparatus.
  8. Nakamura Yasushi,JPX ; Otsuka Seiichiro,JPX, Crystal holding apparatus.
  9. Iino Eiichi,JPX ; Iida Makoto,JPX ; Kimura Masanori,JPX ; Muraoka Shozo,JPX, Crystal pulling method and apparatus.
  10. Urano Masahiko,JPX ; Nakamura Yasushi,JPX ; Otsuka Seiichiro,JPX ; Iino Eiichi,JPX, Crystal pulling methods and apparatus.
  11. Schulmann, Winfried; Kaiser, Helmut, Crystal support.
  12. Muehe, Andreas; Miller, Alfred; Huber, Johann-Andreas, Device for pulling a single crystal.
  13. Schulmann Winfried,DEX, Grip arranged on a pull shaft of a crystal pulling system.
  14. Frasier, Donald J.; Schlienger, M. Eric; Brady, Guy Allen; Kush, Matthew T.; Vessely, Patrick A., Method and apparatus for production of a cast component.
  15. Frasier, Donald J.; Schlienger, M. Eric; Brady, Guy Allen; Kush, Matthew T.; Vessely, Patrick A., Method and apparatus for production of a cast component.
  16. Frasier, Donald J.; Schlienger, M. Eric; Kush, Matthew T., Method and apparatus for production of a cast component.
  17. Frasier, Donald J.; Schlienger, M. Eric; Kush, Matthew T., Method and apparatus for production of a cast component.
  18. Frasier, Donald J.; Schlienger, M. Eric; Vessely, Patrick A., Method and apparatus for production of a cast component.
  19. Li Zhixin, Method and apparatus for securely supporting a growing crystal in a czochralski crystal growth system.
  20. Iwasaki Toshio,JPX ; Fujimoto Shin-ichi,JPX ; Isomura Hiroshi,JPX ; Ishida Takayoshi,JPX ; Tamura Michiharu,JPX ; Ikari Atsushi,JPX, Method for production of dislocation-free silicon single crystal.
  21. Izumi Teruo,JPX, Method for pulling a single crystal.
  22. Izumi Teruo,JPX, Method for pulling a single crystal.
  23. Iino Eiichi,JPX ; Iida Makoto,JPX ; Kimura Masanori,JPX ; Muraoka Shozo,JPX, Method of holding a monocrystal, and method of growing the same.
  24. Fujiwara Hideki,JPX, Method of pulling a single crystal.
  25. Niederer, Kurt; Teroerde, Helmut; Berger, Josef; Meisterernst, Goetz; Muemmler, Frank; Zitzelsberger, Simon, Method of supporting a growing single crystal during crystallization of the single crystal according to the FZ method.
  26. Kim Kyong-Min ; Chandrasekhar Sadasivam, Non-dash neck method for single crystal silicon growth.
  27. Chandrasekhar Sadasivam (Chesterfield MO) Kim Kyong-Min (St. Charles MO), Process for eliminating dislocations in the neck of a silicon single crystal.
  28. Shiraishi Yutaka,JPX, Semiconductor single crystal manufacturing apparatus.
  29. Syue, Sen-Hong; Chen, Pu-Fang; Wang, Shiang-Bau, Semiconductor structure and method.
  30. Chandrasekhar Sadasivam (Chesterfield MO) Kim Kyong-Min (St. Charles MO), Silicon single crystal having eliminated dislocation in its neck.
  31. Yamagishi Hirotoshi,JPX, Single crystal growing apparatus and single crystal growing method.
  32. Iino Eiichi,JPX ; Nakamura Yasushi,JPX ; Otsuka Seiichiro,JPX ; Midzuishi Koji,JPX ; Kimura Masanori,JPX ; Yamagishi Hirotoshi,JPX, Single crystal growing method and apparatus.
  33. Hirotoshi Yamagishi JP, Single crystal growth apparatus and single crystal growth method.
  34. Chiou Herng-Der ; Mason Lawrence Duane ; Hall James B., Single crystal ingot and method for growing the same.
  35. Kuramoto Makoto,JPX, Single crystal pulling apparatus.
  36. Kuramoto Makoto,JPX ; Iida Tetsuhiro,JPX, Single crystal pulling apparatus.
  37. Nishiura Kiyofumi,JPX, Single crystal pulling apparatus.
  38. Ohtsukasa Naritoshi,JPX ; Yoshinada Hiroshi,JPX ; Mimura Kazuhiro,JPX, Single crystal pulling apparatus and droppage preventing device.
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