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Method and apparatus for holding and conveying platelike substrates 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B25J-015/00
출원번호 US-0526284 (1990-05-21)
우선권정보 CH-0000686 (1990-03-05)
발명자 / 주소
  • Malin Cosmas (Mauren LIX) Sawatzki Harry (Vaduz LIX)
출원인 / 주소
  • Tet Techno Investment Trust Settlement (Vaduz LIX 03)
인용정보 피인용 횟수 : 73  인용 특허 : 0

초록 ▼

A method of handling and securing platelike substrates, such as wafers, is described in which a substrate is gripped between supporting elements situated opposite each other in the plane of the substrate to be applied against opposite side edges of the substrate. The gripping forces are applied thro

대표청구항 ▼

Apparatus for use in holding and conveying platelike substrates in substrate processing and inspection machines, said apparatus comprising a movable arm, gripper means on said arm, said gripper means having supporting elements in spaced positions on the gripper means for location on opposite sides o

이 특허를 인용한 특허 (73)

  1. Boris Govzman ; Konstantin Volodarsky ; Leon Volfovski, Apparatus and methods for handling a substrate.
    상세보기
  2. Gaudon, Alain; Astegno, Pierre; El Jarjini, Mohammed, Apparatus and process for identification of characters inscribed on a semiconductor wafer containing an orientation mark.
    상세보기
  3. Lee Jong-Hyun,KRX ; Yoo Hyung-Joun,KRX ; Choi Boo-Yeon,KRX ; Jang Won-Ick,KRX ; Jang Ki-Ho,KRX, Apparatus for transferring a wafer.
    상세보기
  4. Perlov Ilya ; Goder Alexey ; Gantvarg Eugene, Carousel wafer transfer system.
    상세보기
  5. Perlov Ilya ; Goder Alexey ; Gantvarg Eugene, Carousel wafer transfer system.
    상세보기
  6. Englhardt, Eric A.; Rice, Michael R.; Hudgens, Jeffrey C.; Hongkham, Steve; Pinson, Jay D.; Salek, Mohsen; Carlson, Charles; Weaver, William T; Armer, Helen R., Cartesian cluster tool configuration for lithography type processes.
    상세보기
  7. Rice, Mike; Hudgens, Jeffrey; Carlson, Charles; Weaver, William Tyler; Lowrance, Robert; Englhardt, Eric; Hruzek, Dean C.; Silvetti, Dave; Kuchar, Michael; Katwyk, Kirk Van; Hoskins, Van; Shah, Vinay, Cartesian robot cluster tool architecture.
    상세보기
  8. Ishikawa, Tetsuya; Roberts, Rick J.; Armer, Helen R.; Volfovski, Leon; Pinson, Jay D.; Rice, Michael; Quach, David H.; Salek, Mohsen S.; Lowrance, Robert; Backer, John A.; Weaver, William Tyler; Carlson, Charles; Wang, Chongyang; Hudgens, Jeffrey; Herchen, Harald; Lu, Brian, Cluster tool architecture for processing a substrate.
    상세보기
  9. Ishikawa, Tetsuya; Roberts, Rick J.; Armer, Helen R.; Volfovski, Leon; Pinson, Jay D.; Rice, Michael; Quach, David H.; Salek, Mohsen S.; Lowrance, Robert; Backer, John A.; Weaver, William Tyler; Carlson, Charles; Wang, Chongyang; Hudgens, Jeffrey; Herchen, Harald; Lue, Brian, Cluster tool architecture for processing a substrate.
    상세보기
  10. Ishikawa, Tetsuya; Roberts, Rick J.; Armer, Helen R.; Volfovski, Leon; Pinson, Jay D.; Rice, Michael; Quach, David H.; Salek, Mohsen S.; Lowrance, Robert; Backer, John A.; Weaver, William Tyler; Carlson, Charles; Wang, Chongyang; Hudgens, Jeffrey; Herchen, Harald; Lue, Brian, Cluster tool architecture for processing a substrate.
    상세보기
  11. Dixon Richard D. ; Rosen David N. ; Kingsbury Thomas R., Control system for an assembly tool.
    상세보기
  12. Casarotti,Sean A.; Berger,Alexander J.; Kretz,Frank E., Detection and handling of semiconductor wafers and wafer-like objects.
    상세보기
  13. Casarotti,Sean A.; Berger,Alexander J.; Kretz,Frank E., Detection and handling of semiconductor wafers and wafers-like objects.
    상세보기
  14. Begin Robert George, End effector assembly for inclusion in a system for producing uniform deposits on a wafer.
    상세보기
  15. Begin Robert George, End effector assembly for inclusion in a system for producing uniform deposits on a wafer.
    상세보기
  16. Woodruff,Daniel J.; Harris,Randy A.; Erickson,James J.; Carr,Douglas W., End-effectors for handling microelectronic wafers.
    상세보기
  17. Woodruff,Daniel J.; Oberlitner,Thomas H.; Harris,Randy A.; Erickson,James J.; Carr,Douglas W., End-effectors for handling microelectronic workpieces.
    상세보기
  18. Mantz, Paul, Endeffectors for handling semiconductor wafers.
    상세보기
  19. Mantz, Paul, Endeffectors for handling semiconductor wafers.
    상세보기
  20. Mantz, Paul, Endeffectors for handling semiconductor wafers.
    상세보기
  21. Menon, Venugopal; Cox, Damon Keith, Four-bar linkage wafer clamping mechanism.
    상세보기
  22. Shendon, Norman; Hearne, John; Von Lossberg, Bryan, Hydraulically actuated wafer clamp.
    상세보기
  23. Frank J. Ardezzone, IC wafer handling apparatus incorporating edge-gripping and pressure or vacuum driven end-effectors.
    상세보기
  24. Holbrooks, Orville Ray, Intelligent integrated circuit wafer handling system with fail safe system.
    상세보기
  25. Holbrooks Orville Ray, Intelligent wafer handling system and method.
    상세보기
  26. Tinnemans,Patricius Aloysius Jacobus; Buis,Edwin Johan; Donders,Sjoerd Nicolaas Lambertus; Van Elp,Jan; Hoogkamp,Jan Frederik; Van Meer,Aschwin Lodewijk Hendricus Johannes; Smulders,Patrick Johannes Cornelus Hendrik; Spanjers,Franciscus Andreas Cornelis Johannes; Vermeulen,Johannes Petrus Martinus Bernardus; Visser,Raimond; Tegenbosch,Henricus Gerardus; Van Den Berg,Johannes Charles Adrianus; Van De Sande,Henricus Johannes Adrianus; Vervoort,Thijs, Lithographic support structure.
    상세보기
  27. Nguyen, Khiem; Satitpunwaycha, Peter; Mak, Alfred W., Mask etch processing apparatus.
    상세보기
  28. Nguyen,Khiem; Satitpunwaycha,Peter; Mak,Alfred W., Mask etch processing apparatus.
    상세보기
  29. Sundar Satish, Mechanical gripper for wafer handling robots.
    상세보기
  30. Sundar, Satish, Mechanical gripper for wafer handling robots.
    상세보기
  31. Kroeker Tony ; Hudgens Jeffrey C., Mechanically clamping robot wrist.
    상세보기
  32. Verhovsky Yuli, Mechanism for transporting semiconductor-process masks.
    상세보기
  33. Ilya Perlov ; Alexey Goder ; Eugene Gantvarg ; Howard E. Grunes, Method and apparatus for improved substrate handling.
    상세보기
  34. Perlov, Ilya; Goder, Alexey; Gantvarg, Evgueni; Grunes, Howard E, Method and apparatus for improved substrate handling.
    상세보기
  35. Weltlich Kenneth E. (Westminster CO) Chasteen Howard C. (Broomfield CO) Shuster Michael A. (Findlay OH) Pickenbrock Stephen R. (Findlay OH), Method and apparatus for processing container ends.
    상세보기
  36. Wang, Danny; Lubomirsky, Dmitry; Polar, Erwin; Stoehr, Brigitte; Wiltse, Mark; Mok, Yeuk-Fai Edwin; Ma, Frank C., Method and apparatus for transferring and supporting a substrate.
    상세보기
  37. Astegno, Pierre; Esteve, Ekaterina; Gaudon, Alain, Method and device for changing a semiconductor wafer position.
    상세보기
  38. Astegno,Pierre; Esteve,Ekaterina; Gaudon,Alain, Method and device for changing a semiconductor wafer position.
    상세보기
  39. De Ridder, Christianus Gerardus Maria, Method and system for loading substrate supports into a substrate holder.
    상세보기
  40. Rice,Mike; Hudgens,Jeffrey; Carlson,Charles; Weaver,William Tyler; Lowrance,Robert; Englhardt,Eric; Hruzek,Dean C.; Silvetti,Mario David; Kuchar,Michael; Van Katwyk,Kirk; Hoskins,Van; Shah,Vinay, Method of retaining a substrate during a substrate transferring process.
    상세보기
  41. Bacchi, Paul; Filipski, Paul S., Method of using a specimen sensing end effector to determine angular orientation of a specimen.
    상세보기
  42. Buxbaum,Alex; Skyberg,Bjorn, Methods for substrate orientation.
    상세보기
  43. Leslie, Brian C.; Nikoonahad, Mehrdad; Wells, Keith B., Optical scanning system for surface inspection.
    상세보기
  44. Leslie,Brian C.; Nikoonahad,Mehrdad; Wells,Keith B., Optical scanning system for surface inspection.
    상세보기
  45. Leslie,Brian C.; Nikoonahad,Mehrdad; Wells,Keith B., Optical scanning system for surface inspection.
    상세보기
  46. Sundar Satish ; Matthews Ned G., Pneumatically actuated flexure gripper for wafer handling robots.
    상세보기
  47. Freerks, Frederik W.; Ishikawa, Tetsuya; Wang, Timothy Y.; Hudgens, Jeffrey C.; Ciulik, James R.; Salek, Mohsen; Leong, Tim; DiFrancesco, Al, Robot blade for semiconductor processing equipment.
    상세보기
  48. Davis, Jeffry, Robot for handling workpieces in an automated processing system.
    상세보기
  49. Kimura, Yasutomo, Robot hand.
    상세보기
  50. Dobbs Michael E. (Brighton MI) Jones Donald B. (Ann Arbor MI), Robotic substrate manipulator.
    상세보기
  51. Nikoonahad, Mehrdad; Stokowski, Stanley E., Scanning system for inspecting anamolies on surfaces.
    상세보기
  52. Nikoonahad,Mehrdad; Stokowski,Stanley E., Scanning system for inspecting anomalies on surfaces.
    상세보기
  53. Nichols, Michael J.; Guarracina, Louis J., Self-sterilizing automated incubator.
    상세보기
  54. Bacchi, Paul; Filipski, Paul S., Specimen sensing and edge gripping end effector.
    상세보기
  55. Takebayashi Yuji,JPX ; Akao Tokunobu,JPX ; Konno Yoshikazu,JPX, Substrate carrying apparatus.
    상세보기
  56. Yamada, Kohei, Substrate conveying system in exposure apparatus.
    상세보기
  57. Thomas W. Aswad, Substrate cooling system.
    상세보기
  58. Aswad, Thomas W., Substrate cooling system and method.
    상세보기
  59. Sundar,Satish; Baluja,Sanjeev, Substrate edge grip apparatus.
    상세보기
  60. Rice,Michael; Hudgens,Jeffrey; Carlson,Charles; Weaver,William Tyler; Lowrance,Robert; Englhardt,Eric; Hruzek,Dean C.; Silvetti,Mario David; Kuchar,Michael; Katwyk,Kirk Van; Hoskins,Van; Shah,Vinay, Substrate gripper for a substrate handling robot.
    상세보기
  61. Yoshida, Tetsuya; Ukita, Akira, Substrate gripping apparatus, substrate gripping method and substrate releasing method.
    상세보기
  62. Rice, Mike; Hudgens, Jeffrey; Carlson, Charles; Weaver, William Tyler; Lowrance, Robert; Englhardt, Eric; Hruzek, Dean C.; Silvetti, Dave; Kuchar, Michael; Katwyk, Kirk Van; Hoskins, Van; Shah, Vinay, Substrate processing sequence in a cartesian robot cluster tool.
    상세보기
  63. Simondet, Sean D., Systems and methods incorporating an end effector with a rotatable and/or pivotable body and/or an optical sensor having a light path that extends along a length of the end effector.
    상세보기
  64. Hartog,Edwin Den, Two level end effector.
    상세보기
  65. Asari, Satoshi; Mihara, Katsuhiko; Kikuchi, Hiroshi, Vertical heat treatment system and method of transferring process objects.
    상세보기
  66. Saeki Hiroaki,JPX ; Asakawa Teruo,JPX, Wafer for carrying semiconductor wafers and method detecting wafers on carrier.
    상세보기
  67. Asano,Hiroshi, Wafer holding apparatus.
    상세보기
  68. Kim, Woo Young; Bang, In Ho; Lee, Taek Youb, Wafer transfer apparatus.
    상세보기
  69. Thompson Steven R. (Somers MT) LaBere Rikki S. (Kalispell MT), Wafer transfer apparatus.
    상세보기
  70. Thompson Steven R. (Somers MT) LaBere Rikki S. (Kalispell MT), Wafer transfer apparatus.
    상세보기
  71. Fossey Michael E. ; Johnson Kirk Rodney ; Poduje Noel Stephen, Wafer transfer robot.
    상세보기
  72. Lester, Paul; Meyer, Scott; Atkins, Wyland L.; Richards, Douglas; Predoaica, Constantin; Hudgens, Jeffrey; Carlson, Charles; Kankanala, Penchala; Rice, Mike; Papanu, James S.; Baiya, Evanson G.; Rosato, John J., Wet clean system design.
    상세보기
  73. Miyamoto, Akira; Yamada, Takaya; Iura, Jun, Workpiece conveying robot.
    상세보기

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