[특허]Apparatus and method for the transfer and delivery of high purity chemicals

Apparatus and method for the transfer and delivery of high purity chemicals 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	B67D-005/08
출원번호	US-0583826 (1990-09-17)
발명자 / 주소	Geatz Tobin (Durham NC)
출원인 / 주소	Applied Chemical Solutions (Hollister CA 02)
인용정보	피인용 횟수 : 102 인용 특허 : 0

초록 ▼

The present invention provides improved method and apparatus for the transfer and delivery of very high purity chemicals for use in semiconductor production and similar processes. By employing multiple alternating pressure vessels, chemicals are drawn from virtually any bulk source and delivered to one or more end-users. The use of a vacuum system to draw chemicals through sealed conduits eliminates the need for pumps which are a source of both maintenance problems and contamination in the system. Multiple vessels provide for a variety of flow options, which include continuous chemical delivery to the end-users, recirculation and regular filtration during periods of low use, and built-in redundancy to avoid system shut down if there is a component failure.

대표청구항 ▼

An apparatus for providing chemical transfer and delivery of chemical from a bulk source to an end-use station which comprises a lifting vessel; a source conduit between the bulk source and the lifting vessel, including a valve to control fluid flow through the source conduit; a vacuum system in communication with the lifting vessel and including means to evacuate gas selectively from the lifting vessel; a pressure system, operated independently of said vacuum system, in communication with the lifting vessel pressurize selectively the lifting vessel; a delivery vessel in communication with the lifting vessel, including a transfer conduit permitting the transfer of chemical from the lifting vessel to the delivery vessel; a delivery conduit from the delivery vessel to the end-use station, including a valve to control fluid flow through the delivery conduit; a connecting conduits between the lifting vessel, the delivery vessel, and the end use station including valving to regulate flow through such conduits so to allow any vessel to be bypassed in the system without affecting the operation of the wherein said connecting means may include said transfer conduit and said delivery conduit system.

이 특허를 인용한 특허 (102)

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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

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연합인증

Apparatus and method for the transfer and delivery of high purity chemicals 원문보기

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Apparatus and method for the transfer and delivery of high purity chemicals 원문보기

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이 특허를 인용한 특허 (102)

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