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Apparatus to clean solid surfaces using a cryogenic aerosol 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B24C-001/00
출원번호 US-0958417 (1992-10-09)
발명자 / 주소
  • McDermott Wayne T. (Allentown PA) Wu Jin J. (Ossining NY) Ockovic Richard C. (Northampton PA)
출원인 / 주소
  • Air Products and Chemicals, Inc. (Allentown PA 02) International Business Machines Corporation (Armonk NY 02)
인용정보 피인용 횟수 : 152  인용 특허 : 0

초록 ▼

The present invention is an apparatus for cleaning semi-conductor solid surfaces using a spray of frozen cryogen, such as argon, to impinge on the solid surface to remove contaminant particles. The apparatus includes an appropriate nozzle positioned in a housing designed for ultra clean conditions i

대표청구항 ▼

An apparatus for cleaning undesired material from a solid surface using a projected spray of discrete substantially frozen cleaning particles which can vaporize after impingement on the solid surface, comprising: a) a generally closed housing in which a solid surface to be cleaned is accommodated an

이 특허를 인용한 특허 (152)

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