초록 ▼

A semiconductor wafer container comprises two identical parts, one forming the bottom and the other forming the lid. Each part has the overall shape of a disk defining a central axis (4) and comprises on a first surface a high number of protruding parts (6) arranged according to a peripheral circle

A semiconductor wafer container comprises two identical parts, one forming the bottom and the other forming the lid. Each part has the overall shape of a disk defining a central axis (4) and comprises on a first surface a high number of protruding parts (6) arranged according to a peripheral circle and defined by intersecting plane surfaces which are obliquely slanted with respect to a plane corresponding to the disk. The protruding parts 6 are adjacently joined according to external (9) and internal (10) edges radially oriented with respect to the central axis (4) for forming a saw-tooth ring.

대표청구항 ▼

A container system for containing a semiconductor wafer, comprising: a container formed of two identical parts, one forming the bottom and the other forming the lid of the container, each part substantially forming a disk defining a central axis and having an internal first surface and an external s

A container system for containing a semiconductor wafer, comprising: a container formed of two identical parts, one forming the bottom and the other forming the lid of the container, each part substantially forming a disk defining a central axis and having an internal first surface and an external second surface, wherein each part comprises on said first surface a plurality of protruding parts arranged according to a peripheral circle to form a saw-tooth ring, each protruding part being defined by two intersecting plane surfaces which are slanted with respect to a plane containing external edges of the intersecting plane surfaces, said external edges being radially oriented with respect tot he central axis, said first surface having a first generally conical surface within said saw-tooth ring; and a flexible envelope made of a selected plastic material, shaped and sized so that the two parts cooperating to form the container can be placed therein and held together by providing a vacuum to the inside of the flexible envelope wherein said second surface comprises a circular ridge which is defined in part by a second generally conical surface formed to fit to said first generally conical surface inside said saw-tooth ring for blocking an adjacent part when a plurality of parts are piled up with respect to one another.