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Adjusting device for microscopic movements 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-041/08
출원번호 US-0732224 (1991-07-18)
우선권정보 DE-4023311 (1990-07-21)
발명자 / 주소
  • Berghaus Thomas (Wiesbaden DEX) Klaede Peter (Frankfurt DEX)
출원인 / 주소
  • Omicron Vakuumphysik GmbH (Taunusstein DEX 03)
인용정보 피인용 횟수 : 53  인용 특허 : 0

초록

The description relates to an adjusting device 1 for microscopic movements and comprising a carrier element 3 with, fixed on the carrier element 3, drive elements 6a, 6b, 6c which have a piezoelectric transducer which utilises the shear effect and which have a bearing element 5 which rests on the dr

대표청구항

An adjusting device for microscopic movements, with a carrier element with, fixed on the carrier element, at least one drive element comprising a piezoelectric transducer which utilises the shear effect, and with a bearing element which rests on the drive element, characterized in that only the driv

이 특허를 인용한 특허 (53)

  1. Bartzke, Karlheinz; Mack, Stefan; Burkhardt, Matthias; Hartmann, Thomas; Steiner, Reinhard; Dittrich, Peter; Klopfleisch, Karl-Heinz, Adjusting device for displacing individual elements of optical systems or of measuring systems.
  2. Joffe Benjamin, Advanced magnetically-stabilized couplings and bearings, for use in mechanical drives.
  3. Joffe Benjamin, Advanced magnetically-stabilized couplings and bearings, for use in mechanical drives.
  4. Hwang, Ing-Shouh; Hwu, En-Te; Danzebrink, Hans Ulrich; Illers, Hartmut, Alignment and anti-drift mechanism.
  5. Moler, Jeff; Bugel, John; Thornhill, Keith A; Oudshoorn, Mark P, Apparatus and process for optimizing work from a smart material actuator product.
  6. Moler,Jeff; Bugel,John; Thornhill,Keith A.; Oudshoorn,Mark P., Apparatus and process for optimizing work from a smart material actuator product.
  7. Jenko,Edward J., Apparatus for adjustable hot runner assembly seals and tip height using active material elements.
  8. Niewels,Joachim Johannes, Apparatus for injection molding using active material elements.
  9. Moler, Jeff, Apparatus for moving a pair of opposing surfaces in response to an electrical activation.
  10. Moler, Jeff, Apparatus for moving a pair of opposing surfaces in response to an electrical activation.
  11. Moler, Jeff, Apparatus for moving a pair of opposing surfaces in response to an electrical activation.
  12. Bugel, John Anthony; Moler, Jeff, Apparatus for moving folded-back arms having a pair of opposing surfaces in response to an electrical activation.
  13. Moler, Jeff; Oudshoorn, Mark; Akhavein, R. Glenn; Woozley, Mark; Alexy, Michael, Apparatus having a pair of opposing surfaces driven by a piezoelectric actuator.
  14. Moler, Jeff; Oudshoorn, Mark; Akhavein, R. Glenn; Woozley, Mark; Alexy, Michael, Apparatus having a pair of opposing surfaces driven by a piezoelectric actuator.
  15. Moler, Jeff; Oudshoorn, Mark; Akhavein, R. Glenn; Woozley, Mark; Alexy, Michael, Apparatus having a support structure and actuator.
  16. Bansevicius Ramutis,LTX ; Ahmed Sami,GBX, Bearings and supports.
  17. Baur, Christof; Folaron, Robert J.; Hartman, Adam; Foster, Philip C.; Nelson, Jay C.; Stallcup, II, Richard E., Charged particle beam device probe operation.
  18. Baur,Christof; Folaron,Robert J.; Hartman,Adam; Foster,Philip C.; Nelson,Jay C.; Stallcup, II,Richard E., Charged particle beam device probe operation.
  19. Smith,Derek K. W., Control system for utilizing active material elements in a molding system.
  20. Hakan Olin SE; Kristian Gustavsson SE; Per Gralvik SE, Device for micropositioning of an object.
  21. Okamoto Yasuhiro,JPX ; Yoshida Ryuichi,JPX ; Sugimoto Yoshitaka,JPX, Driving apparatus using transducer.
  22. Yoshida Ryuichi,JPX ; Okamoto Yasuhiro,JPX ; Kuwana Minoru,JPX, Driving apparatus using transducer.
  23. Kosaka Akira,JPX ; Kanbara Tetsuro,JPX, Electromechanical actuator that compensates for an applied load and apparatus employing the same.
  24. Grundl Andreas,DEX ; Bob Konstantin,DEX ; Bob Alexander,DEX, Endoscope with a movable frontal end area.
  25. Rajadasa R. Hebbar ; Ramanujam Ramabhadran ; Srinivasan Chandrasekar, Hybrid servomechanism for micro-electrical discharge machining.
  26. Karrai, Khaled; Haines, Miles, Inertial rotation device.
  27. Murdick, Ryan; Novotny, Lukas, Integrated microscope and related methods and devices.
  28. Oudshoorn, Mark; Moler, Jeff; Akhavein, R. Glenn; Woozley, Mark; Blatt, John, Linear motor having piezo actuators.
  29. Williams,Eric C.; Arnone,David F.; Sharma,Manish, Linear output, closed loop mover assembly.
  30. Pryadkin, Sergiy; Wang, Zhouhang; Royzenblat, Gennady; Pan, Xun, Linear piezoelectric nano-positioner.
  31. Joffe Benjamin, Magnetically stabilized couplings and bearings for use in mechanical drives.
  32. Joffe, Benjamin, Magnetically stabilized precision table and load-carrying bearings.
  33. Dyer, Mark J.; Yu, Min-Feng; Bray, Ken, Manipulation system for manipulating a sample under study with a microscope.
  34. Jenko, Edward J., Method adjustable hot runner assembly seals and tip height using active material elements.
  35. Niewels,Joachim Johannes, Method and apparatus for controlling a vent gap with active material elements.
  36. Mark Oudshoorn ; Jeff Moler ; R. Glenn Akhavein, Method and system for automatically tuning a stringed instrument.
  37. Skidmore,George; Ellis,Matthew D.; Geisberger,Aaron; Bray,Kenneth; Tuck,Kimberly; Folaron,Robert, Method, system and device for microscopic examination employing fib-prepared sample grasping element.
  38. Yoon, Eui Sung; Yang, Sung Wook; Kim, Jin Seok; Rho, Duk Moon; Park, Ki Tae; Lee, Se Min; Cho, Jei Won; Shin, Hee Sup, Micro manipulator for electrode movement in neural signal recording.
  39. Kim,Byung kyu; Park,Suk ho; Shin,Hee sup; Kim,Dae soo; Park,Hyun jun; Park,Jong oh, Micro manipulator for movement of electrode, driving method thereof, and measuring device of brain signal using the same.
  40. Yu, Min-Feng; Dyer, Mark J.; Bray, Ken, Modular manipulation system for manipulating a sample under study with a microscope.
  41. Yu,Min Feng; Dyer,Mark J.; Bray,Ken, Modular manipulation system for manipulating a sample under study with a microscope.
  42. Hwang, Ing-Shouh; Hwu, En-Te; Hung, Shao-Kang, Optical imaging system.
  43. Ohashi, Kaishi; Seki, Hiroyuki; Tsukimoto, Takayuki; Yamamoto, Shinji, Oscillatory wave drive unit and image stabilization device.
  44. Randall, John N.; Peng, Jingping; Liu, Jun-Fu; Skidmore, George D.; Baur, Christof; Stallcup, Richard E.; Folaron, Robert J., Patterned atomic layer epitaxy.
  45. Randall,John N.; Peng,Jingping; Liu,Jun Fu; Skidmore,George D.; Baur,Christof; Stallcup, II,Richard E.; Folaron,Robert J., Patterned atomic layer epitaxy.
  46. Baur,Christof; Bray,Kenneth L., Positioning device for microscopic motion.
  47. Baur,Christof; Stallcup, II,Richard E., Probe current imaging.
  48. Williams,Eric C; Arnone,David F., Sealed mover assembly.
  49. Schmid, Andreas; Schaff, Oliver, Translation and rotation positioning motor.
  50. Schmid,Andreas; Schaff,Oliver, Translation and rotation positioning motor.
  51. Moler, Jeff, Uni-body piezoelectric motor.
  52. Yamamoto, Shinji, Vibration type driving apparatus.
  53. Zumeris Jona (Nesher ILX) Rafaeli Izhak (Haifa ILX), Window raising device.
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