[특허]Fluid flow sensor with thermistor detector

Fluid flow sensor with thermistor detector 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G01F-001/68
출원번호	US-0743961 (1991-08-12)
발명자 / 주소	Erskine James C. (Birmingham MI) Lambert David K. (Sterling Heights MI) Harrington Charles R. (Troy MI)
출원인 / 주소	General Motors Corporation (Detroit MI 02)
인용정보	피인용 횟수 : 50 인용 특허 : 0

초록 ▼

An airflow sensor formed on a silicon chip comprises a silicon base covered with an insulating polyimide layer, a lineal resistance heater on the chip energized with current pulses to propagate thermal waves, and a thermistor on the chip downstream of the heater to detect the arrival of each thermal wave. Circuitry determines flow rate as a function of the measured propagation time of the thermal wave. The thermistor may be replaced by a bridge of four resistive elements of which only one or two are sensitive to the thermal wave. The thermistor material is platinum, polycrystalline silicon or amorphous silicon which exhibit high temperature coefficients of resistance.

대표청구항 ▼

A mass flow fluid sensor apparatus comprising: a mass flow sensor substrate for immersion in a moving fluid having a direction of flow, said mass flow sensor substrate having a thermal conductive body and a surface layer of a thermally and electrically insulating material; a resistive strip heater supported on said substrate surface layer; a first strip thermistor supported on said substrate surface layer for disposition upstream of said resistive strip heater, with respect to said direction of fluid flow; a second strip thermistor supported on said substrate surface layer for disposition downstream of said resistive strip heater, with respect to said direction of fluid flow; each of said heater, thermistors and all interconnecting circuitry being of the same material and thickness, and said thermistors mutually being of the game geometry and having a width and thickness that is small with respect to its length, effective to provide a geometric symmetry; means for supplying periodic heating power to said strip heater, for propagating thermal waves upstream and downstream through the moving fluid; means for applying a similar bias current at a similar voltage across each of said first and second thermistor, effective to provide an electrical symmetry; signal processing means for detecting changes to voltage across said upstream and downstream thermistors, and for comparing such voltage changes in response to changes in the mass flow rate of said fluid, effective to determine mass flow rate of said fluid by determining the difference in arrival time or phase of said thermal waves from said strip heater at said upstream and downstream thermistors.

이 특허를 인용한 특허 (50)

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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

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연합인증

Fluid flow sensor with thermistor detector 원문보기

초록 ▼

대표청구항 ▼

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Fluid flow sensor with thermistor detector 원문보기

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대표청구항 ▼

연구과제 타임라인

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이 특허를 인용한 특허 (50)

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