$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Method of making backside illuminated image sensors 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-031/18
출원번호 US-0923674 (1992-08-03)
발명자 / 주소
  • Hawkins Gilbert A. (Mendon NY) Gluck Ronald M. (Rochester NY)
출원인 / 주소
  • Eastman Kodak Company (Rochester NY 02)
인용정보 피인용 횟수 : 80  인용 특허 : 0

초록 ▼

A method of making a backside illuminated image includes forming a device on the frontside of thin device layer provided on an oxide layer which is mounted on a sacrificial substrate and bonding the front side of the device layer to a permanent silicon support substrate. Thereafter, the oxide layer

대표청구항 ▼

In a method of making an image sensor which will be backside illuminated, comprising the steps of: (a) forming a first oxide layer on a thin epitaxial device layer grown on a first sacrificial silicon substrate; (b) forming a boron containing region at the interface of the backside of the device lay

이 특허를 인용한 특허 (80)

  1. Dungan, Thomas E.; Palsule, Chintamani, Apparatus, system, and method providing backside illuminated imaging device.
    상세보기
  2. Pain, Bedabrata, Back-illuminated imager and method for making electrical and optical connections to same.
    상세보기
  3. Ueno, Risako; Suzuki, Kazuhiro; Funaki, Hideyuki; Iida, Yoshinori, Back-illuminated type solid-state imaging device and method of manufacturing the same.
    상세보기
  4. Hsu, Tzu-Hsuan; Liu, Han-Chi; Wang, Ching-Chun, Backside depletion for backside illuminated image sensors.
    상세보기
  5. Hsu, Tzu-Hsuan; Liu, Han-Chi; Wang, Ching-Chun, Backside depletion for backside illuminated image sensors.
    상세보기
  6. Park, Sung-Hyung; Lee, Ju-Il, Backside illuminated image sensor.
    상세보기
  7. Brady, Frederick T., Backside illuminated image sensor with shallow backside trench for photodiode isolation.
    상세보기
  8. Costello,Kenneth A; Fairbairn,Kevin P.; Brown,David W.; Chung,Yun; Gober,Patricia; Yin,Edward, Backside imaging through a doped layer.
    상세보기
  9. Costello,Kenneth A; Fairbairn,Kevin P.; Brown,David W.; Chung,Yun; Gober,Patricia; Yin,Edward, Backside thinning of image array devices.
    상세보기
  10. Costello,Kenneth A; Fairbairn,Kevin P.; Brown,David W.; Chung,Yun; Gober,Patricia; Yin,Edward, Backside thinning of image array devices.
    상세보기
  11. Saylor, Stephen D.; Pralle, Martin U., Biometric imaging devices and associated methods.
    상세보기
  12. Kumar, Mrityunjay; Adams, Jr., James E.; Pillman, Bruce H., CFA image with synthetic panchromatic image.
    상세보기
  13. Brady, Frederick T., Color filter array alignment mark formation in backside illuminated image sensors.
    상세보기
  14. Adams, Jr., James E.; Kumar, Mrityunjay; Pillman, Bruce H.; Hamilton, James A., Color filter array pattern having four-channels.
    상세보기
  15. Brissot, Louis; Pourquier, Eric, Color image sensor on transparent substrate and method for making same.
    상세보기
  16. Pourquier,Eric; Brissot,Louis; Simon,Gilles; Jutant,Alain; Rommeveaux,Philippe, Color image sensor with enhanced colorimetry and method for making same.
    상세보기
  17. Coronel,Philippe; Leverd,Francois; Skotnicki,Thomas, Electronic components and method of fabricating the same.
    상세보기
  18. Sorich,Stephen; Stainer,Matthew, Electronic device and process for forming same.
    상세보기
  19. Bradley J. Boggs ; Marcus S. Just ; Kevin C. Stark ; Christopher A. Bang, Flexible silicon strain gage.
    상세보기
  20. Adams, Jr., James E.; Kumar, Mrityunjay; Pillman, Bruce H.; Hamilton, James A., Four-channel color filter array interpolation.
    상세보기
  21. Adams, Jr., James E.; Kumar, Mrityunjay; Pillman, Bruce H.; Hamilton, James A., Four-channel color filter array pattern.
    상세보기
  22. Jiang, Jutao; Borg, Matt, High dynamic range CMOS image sensor having anti-blooming properties and associated methods.
    상세보기
  23. Carey, James E.; Miller, Drake, High speed photosensitive devices and associated methods.
    상세보기
  24. Hsu, Tzu-Hsuan; Yaung, Dun-Nian; Wang, Ching-Chun, Image sensor element for backside-illuminated sensor.
    상세보기
  25. Hsu, Tzu-Hsuan; Yaung, Dun-Nian; Wang, Ching-Chun, Image sensor element for backside-illuminated sensor.
    상세보기
  26. Yoon, Junho, Image sensor including a light shielding pattern.
    상세보기
  27. Compton, John T.; Hamilton, Jr., John F., Image sensor with improved light sensitivity.
    상세보기
  28. Compton, John T.; Hamilton, Jr., John F., Image sensor with improved light sensitivity.
    상세보기
  29. Compton, John T.; Hamilton, Jr., John F.; DeWeese, Thomas E., Image sensor with improved light sensitivity.
    상세보기
  30. Burke Barry E. ; Kosicki Bernard B., Interconnection technique for hybrid integrated devices.
    상세보기
  31. Adams, Jr., James E.; Kumar, Mrityunjay; Pillman, Bruce H.; Hamilton, James A., Interpolation for four-channel color filter array.
    상세보기
  32. Mougin, Stephane; Tubert, Cedric, Method and device for protecting an integrated circuit against backside attacks.
    상세보기
  33. Kim, Tae Gyu, Method for fabricating image sensor.
    상세보기
  34. Pain,Bedabrata, Method for implementation of back-illuminated CMOS or CCD imagers.
    상세보기
  35. Hsu, Tzu-Hsuan; Yaung, Dun-Nian, Method for providing metal extension in backside illuminated sensor for wafer level testing.
    상세보기
  36. Faure, Bruce; Di Cioccio, Lea, Method of fabricating an epitaxially grown layer.
    상세보기
  37. Faure, Bruce; Di Cioccio, Lea, Method of fabricating an epitaxially grown layer.
    상세보기
  38. Faure, Bruce; Letertre, Fabrice, Method of fabricating an epitaxially grown layer.
    상세보기
  39. Faure, Bruce; Letertre, Fabrice, Method of fabricating an epitaxially grown layer.
    상세보기
  40. Fu, Shih-Chi; Shiau, Gwo-Yuh; Yao, Liang-Lung; Hsieh, Yuan-Chih; Shiu, Feng-Jia, Method of fabricating backside illuminated image sensor.
    상세보기
  41. Fu, Shih-Chu; Shiau, Gwo-Yuh; Yao, Liang-Lung; Hsieh, Yuan-Chih; Shiu, Feng-Jia, Method of fabricating backside illuminated image sensor.
    상세보기
  42. Takasu Hiroaki,JPX ; Kojima Yoshikazu,JPX ; Takahashi Kunihiro,JPX ; Yamazaki Tsuneo,JPX ; Iwaki Tadao,JPX, Method of forming a semiconductor device for a light valve.
    상세보기
  43. Chiang, Shang-Yi; Wang, Chung; Wuu, Shou-Gwo; Yaung, Dun-Nian, Method of making a deep junction for electrical crosstalk reduction of an image sensor.
    상세보기
  44. Chiang, Shang-Yi; Wang, Chung; Wuu, Shou-Gwo; Yaung, Dun-Nian, Method of making deep junction for electrical crosstalk reduction of an image sensor.
    상세보기
  45. Hsu, Tzu-Hsuan; Hsieh, Chris; Yaung, Dun-Nian; Yu, Chung-Yi, Method of making wafer structure for backside illuminated color image sensor.
    상세보기
  46. Hsu, Tzu-Hsuan; Hsieh, Yuan-Chih; Yaung, Dun-Nian; Yu, Chung-Yi, Method of making wafer structure for backside illuminated color image sensor.
    상세보기
  47. Truong, Nugent; Macpherson, Charles Douglas, Methods for forming an undercut region and electronic devices incorporating the same.
    상세보기
  48. Truong,Nugent; MacPherson,Charles Douglas, Methods for forming an undercut region and electronic devices incorporating the same.
    상세보기
  49. Hsu, Tzu-Hsuan; Yaung, Dun-Nian; Wang, Ching-Chun, Photodetector for backside-illuminated sensor.
    상세보기
  50. Haddad, Homayoon; Jiang, Jutao; McKee, Jeffrey; Miller, Drake; Forbes, Leonard; Palsule, Chintamani, Photosensitive imaging devices and associated methods.
    상세보기
  51. Haddad, Homayoon; Jiang, Jutao; McKee, Jeffrey; Miller, Drake; Forbes, Leonard; Palsule, Chintamani, Photosensitive imaging devices and associated methods.
    상세보기
  52. Haddad, Homayoon; Jiang, Jutao; McKee, Jeffrey; Miller, Drake; Palsule, Chintamani; Forbes, Leonard, Photosensitive imaging devices and associated methods.
    상세보기
  53. Jiang, Jutao; McKee, Jeffrey; Pralle, Martin U., Photosensitive imaging devices and associated methods.
    상세보기
  54. Jiang, Jutao; McKee, Jeffrey; Pralle, Martin U., Photosensitive imaging devices and associated methods.
    상세보기
  55. Pralle, Martin U.; McKee, Jeffrey; Sickler, Jason, Pixel isolation elements, devices and associated methods.
    상세보기
  56. Pralle, Martin U.; McKee, Jeffrey; Sickler, Jason, Pixel isolation elements, devices and associated methods.
    상세보기
  57. Gambino, Jeffrey P.; Jaffe, Mark D.; Ellis-Monaghan, John; Rassel, Richard, Pixel sensor cell including light shield.
    상세보기
  58. Jung-Chin Chen TW; Cheng-Han Lee TW, Poly gate silicide inspection by back end etching.
    상세보기
  59. Hall Mark D. ; Ferguson Gregory Steven ; Mitchell Joel Patrick ; Suryanata Johanes P. D., Process for forming a semiconductor device.
    상세보기
  60. Bieck, Dipl.-Ing. Florian; Leib, Jürgen, Process for making contact with and housing integrated circuits.
    상세보기
  61. Bieck, Dipl.-Ing. Florian; Leib, Jürgen, Process for making contact with and housing integrated circuits.
    상세보기
  62. Bieck, Florian; Leib, Jürgen, Process for making contact with and housing integrated circuits.
    상세보기
  63. Bieck, Florian; Leib, Jürgen, Process for making contact with and housing integrated circuits.
    상세보기
  64. Haddad, Homayoon; McKee, Jeffrey; Jiang, Jutao; Miller, Drake; Palsule, Chintamani; Forbes, Leonard, Process module for increasing the response of backside illuminated photosensitive imagers and associated methods.
    상세보기
  65. Haddad, Homayoon; McKee, Jeffrey; Jiang, Jutao; Miller, Drake; Palsule, Chintamani; Forbes, Leonard, Process module for increasing the response of backside illuminated photosensitive imagers and associated methods.
    상세보기
  66. Hamilton, Jr., John F.; Compton, John T., Processing color and panchromatic pixels.
    상세보기
  67. Hamilton, Jr., John F.; Compton, John T., Processing color and panchromatic pixels.
    상세보기
  68. Kumar, Mrityunjay; Adams, Jr., James E., Producing full-color image using CFA image.
    상세보기
  69. Kumar, Mrityunjay; Adams, Jr., James E., Producing full-color image with reduced motion blur.
    상세보기
  70. Enge, Amy D.; Compton, John T.; Pillman, Bruce H., Providing multiple video signals from single sensor.
    상세보기
  71. Haddad, Homayoon; Jiang, Jutao, Shallow trench textured regions and associated methods.
    상세보기
  72. Hsu, Tzu-Hsuan; Yaung, Dun-Nian, Spectrally efficient photodiode for backside illuminated sensor.
    상세보기
  73. Pain, Bedabrata; Cunningham, Thomas J., Structure for implementation of back-illuminated CMOS or CCD imagers.
    상세보기
  74. Shaheen, Mohamad A; Allibert, Frederic; Gaudin, Gweltaz; Lallement, Fabrice; Landru, Didier; Landry, Karine; Mazure, Carlos, Substrate having a charged zone in an insulating buried layer.
    상세보기
  75. Shaheen, Mohamad; Allibert, Frederic; Gaudin, Gweltaz; Lallement, Fabrice; Landru, Didier; Landry, Karin; Mazure, Carlos, Substrate having a charged zone in an insulating buried layer.
    상세보기
  76. Haddad, Homayoon; Feng, Chen; Forbes, Leonard, Three dimensional imaging utilizing stacked imager devices and associated methods.
    상세보기
  77. Letertre, Fabrice; Le Vaillant, Yves Mathieu; Jalaguier, Eric, Wafer and method of producing a substrate by transfer of a layer that includes foreign species.
    상세보기
  78. Letertre, Fabrice; Le Vaillant, Yves Mathieu; Jalaguier, Eric, Wafer and method of producing a substrate by transfer of a layer that includes foreign species.
    상세보기
  79. Brady, Frederick T., Wafer level processing for backside illuminated image sensors.
    상세보기
  80. Brady, Frederick T., Wafer level processing for backside illuminated sensors.
    상세보기

관련 콘텐츠

섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로