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Multi-layer thin film structure and parallel processing method for fabricating same 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B32B-015/04
  • H01L-029/12
출원번호 US-0695368 (1991-05-03)
발명자 / 주소
  • Arjavalingam Gnanalingam (Yorktown Heights NY) Deutsch Alina (Chappaqua NY) Doany Fuad E. (Katonah NY) Furman Bruce K. (Beacon NY) Hunt Donald J. (Pine Bush NY) Narayan Chandrasekhar (Hopewell Juncti
출원인 / 주소
  • IBM Corporation (Armonk NY 02)
인용정보 피인용 횟수 : 49  인용 특허 : 0

초록

A method and apparatus for releasing a workpiece from a substrate including providing a substrate which is transparent to a predetermined wavelength of electromagnetic radiation; forming, on the substrate, a separation layer which degrades in response to the predetermined radiation; providing the wo

대표청구항

A structure for receiving electromagnetic radiation having a wavelength and an energy, the structure comprising: a substrate which is transparent to the wavelength of the electromagnetic radiation; a separation layer disposed on said substrate, said separation layer degrading in response to the ener

이 특허를 인용한 특허 (49)

  1. Tolles, Robert D., Apparatus for making a polishing pad with a partial adhesive coating.
  2. Khachatryan, Hayk, Apparatus for temporary bonding of substrate on a carrier and method thereof.
  3. Andry, Paul S.; Sprogis, Edmund J.; Tsang, Cornelia K., CMOS structure and method of manufacture.
  4. Andry, Paul S.; Sprogis, Edmund J.; Tsang, Cornelia K., CMOS structure on replacement substrate.
  5. Chung, Kevin Kwong-Tai, Carrier tape.
  6. Doany, Fuad E.; Narayan, Chandrasekhar, Damage-free self-limiting through-substrate laser ablation.
  7. Kim, Tae-Woong; An, Sung-Guk; Jin, Dong-un; Kim, Hyung-Sik; Kim, Young-Gu; Seo, Sang-Joon, Flexible display and method for manufacturing the same.
  8. Beaman, Brian Samuel; Fogel, Keith Edward; Lauro, Paul Alfred; Norcott, Maurice Heathcote; Shih, Da Yuan; Walker, George Frederick, High density integrated circuit apparatus, test probe and methods of use thereof.
  9. Brian Samuel Beaman ; Keith Edward Fogel ; Paul Alfred Lauro ; Maurice Heathcote Norcott ; Da-Yuan Shih ; George Frederick Walker, High density integrated circuit apparatus, test probe and methods of use thereof.
  10. Farooq Mukta S. ; Kotecki David E. ; Rita Robert A. ; Rossnagel Stephen M., High temperature, conductive thin film diffusion barrier for ceramic/metal systems.
  11. Peter A. Franklin ; Arthur G. Merryman ; Rajesh S. Patel ; Thomas A. Wassick, Inherently robust repair process for thin film circuitry using UV laser.
  12. Franklin, Peter A.; Merryman, Arthur G.; Patel, Rajesh S.; Wassick, Thomas A., Inherently robust repair process for thin film circuitry using uv laser.
  13. Tanaka Shinji,JPX, Laminate organic resin wiring board and method of producing the same.
  14. Sheats,James; Nguyen,Tue, Lamination and delamination technique for thin film processing.
  15. Ono, Yoshihiro, METHOD OF TRANSCRIBING A WIRING PATTERN FROM AN ORIGINAL SUBSTRATE TO A SUBSTRATE WITH CLOSELY MATCHED THERMAL EXPANSION COEFFICIENTS BETWEEN BOTH SUBSTRATES FOR DIMENSIONAL CONTROL OF THE TRANSCRIBE.
  16. Morisue, Masafumi; Watanabe, Ryosuke; Maruyama, Junya; Yamada, Daiki, Manufacturing method of semiconductor device.
  17. Ogita, Kaori; Tamura, Tomoko, Manufacturing method of semiconductor device including peeling step.
  18. Budd, Russell A.; Dang, Bing; Knickerbocker, John U., Method and apparatus for laser dicing of wafers.
  19. Magerlein, John H.; Patel, Chirag S.; Sprogis, Edmund J.; Stoller, Herbert I., Method and manufacture of silicon based package and devices manufactured thereby.
  20. Khachatryan, Hayk, Method for manufacturing display device.
  21. McAllister Michael ; Perfecto Eric Daniel ; McDonald James ; Prasad Keshav ; Robbins Gordon J. ; Prasad Chandrika ; Swaminathan Madhavan ; White George Eugene, Method for repairing defective electrical connections on multi-layer thin film (MLTF) electronic packages.
  22. Schofield Kevin H., Method of laser ablation of semiconductor structures.
  23. Brofman, Peter J.; Daves, Glenn G.; Ray, Sudipta K.; Stoller, Herbert I., Method of manufacture of silicon based package.
  24. Magerlein,John H.; Patel,Chirag S.; Sprogis,Edmund J.; Stoller,Herbert I., Method of manufacture of silicon based package and devices manufactured thereby.
  25. Codding, Steven R.; Krywanczyk, Timothy C.; Neary, Timothy E.; Sprogis, Edmund J., Method of thinning a semiconductor substrate.
  26. Eldridge, Benjamin N.; Grube, Gary W.; Khandros, Igor Y.; Mathieu, Gaetan L., Method of wirebonding that utilizes a gas flow within a capillary from which a wire is played out.
  27. Farnworth, Warren M.; Wood, Alan G., Methods for wafer-level packaging of microfeature devices and microfeature devices formed using such methods.
  28. Farnworth, Warren M.; Wood, Alan G., Methods for wafer-level packaging of microfeature devices and microfeature devices formed using such methods.
  29. Yu Roy ; Prasad Chandrika ; Pennacchia John R. ; Hamel Harvey C., Multiple-plane pair thin-film structure and process of manufacture.
  30. Yoshimura, Tetsuzo; Takahashi, Yasuhito; Roman, James; McCormack, Mark Thomas; Beilin, Solomon I.; Wang, Wen-chou Vincent; Inao, Masaaki, Optical coupling structures and the fabrication processes.
  31. Pogge, H. Bernhard; Prasad, Chandrika; Yu, Roy, Process for making fine pitch connections between devices and structure made by the process.
  32. Pogge,H. Bernhard; Prasad,Chandrika; Yu,Roy, Process for making fine pitch connections between devices and structure made by the process.
  33. Caillat Patrice,FRX ; Henry David,FRX, Process for manufacturing an interconnection substrate to connect a chip onto a reception substrate.
  34. Kelly Kimberley A. ; Malhotra Ashwani K. ; Perfecto Eric D. ; Yu Roy, Process for releasing a thin-film structure from a substrate.
  35. Kelly Kimberley A. ; Malhotra Ashwani K. ; Perfecto Eric D. ; Yu Roy, Process for transferring a thin-film structure to a substrate.
  36. Kelly Kimberley A. ; Malhotra Ashwani K. ; Perfecto Eric D. ; Yu Roy, Process for transferring a thin-film structure to a temporary carrier.
  37. Osamu Yokoyama JP; Tatsuya Shimoda JP; Satoru Miyashita JP, Projector and method of manufacturing a light modulation device.
  38. Yokoyama, Osamu; Shimoda, Tatsuya; Miyashita, Satoru, Projector and method of manufacturing a light modulation device.
  39. Franklin Peter A. ; Hendricks Charles J. ; Surprenant Richard P. ; Tirch ; III Stephen J. ; Wassick Thomas A. ; Wood James P., Seed metal delete process for thin film repair solutions using direct UV laser.
  40. Pratt, David S., Semiconductor assemblies, stacked semiconductor devices, and methods of manufacturing semiconductor assemblies and stacked semiconductor devices.
  41. Pratt, David S., Semiconductor assemblies, stacked semiconductor devices, and methods of manufacturing semiconductor assemblies and stacked semiconductor devices.
  42. Pratt, David S., Semiconductor assemblies, stacked semiconductor devices, and methods of manufacturing semiconductor assemblies and stacked semiconductor devices.
  43. Yoshimura, Tetsuzo; Takahashi, Yasuhito; Roman, James; Beilin, Solomon I.; Wang, Wen-chou Vincent; Inao, Masaaki, Single and multilayer waveguides and fabrication process.
  44. Yang, Chih-kuang, Structure combining an IC integrated substrate and a carrier, and method of manufacturing such structure.
  45. Yang, Chih-kuang, Substrate with multi-layer interconnection structure and method of manufacturing the same.
  46. Smith, Gordon C., Very ultra thin conductor layers for printed wiring boards.
  47. Smith, Gordon C., Very ultra thin conductor layers for printed wiring boards.
  48. Gordon Smith, Very ultra thin conductor-layers for printed wiring boards.
  49. Caletka,David Vincent; Park,Seungbae; Sathe,Sanjeev Balwant, Wafer scale thin film package.
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