초록 ▼

A liquid crystal display includes an insulating substrate, a first metal layer formed on the substrate, a first insulating layer including an oxide of tantalum nitride with high ratio of nitrization formed on the first metal layer, a second insulating layer including an oxide of tantalum nitride wit

A liquid crystal display includes an insulating substrate, a first metal layer formed on the substrate, a first insulating layer including an oxide of tantalum nitride with high ratio of nitrization formed on the first metal layer, a second insulating layer including an oxide of tantalum nitride with low ratio of nitrization formed on the first insulating layer, and a second metal layer formed on the second insulating layer.

대표청구항 ▼

A liquid crystal display comprising: a first insulating substrate; a plurality of signal lines formed on said first substrate; a plurality of MIM elements connected to said signal lines; pixel electrodes connected to said MIM elements a second insulating substrate; a plurality of opposing electrodes

A liquid crystal display comprising: a first insulating substrate; a plurality of signal lines formed on said first substrate; a plurality of MIM elements connected to said signal lines; pixel electrodes connected to said MIM elements a second insulating substrate; a plurality of opposing electrodes formed on said second substrate and facing said pixel electrodes; and a liquid crystal layer sandwiched between said first and second substrate; wherein said MIM elements each include a first metal layer including a portion of said signal line, a first insulating layer formed on said first metal layer and including an oxide of tantalum nitride (TaOxNy) with a first ratio of nitrization, a second insulating layer formed on said first insulating layer and including an oxide of tantalum nitride (TaOxNy) with a second ratio of nitrization which is lower than said first ratio, and a second metal layer formed on said second insulating layer.