$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Thermal mass flow sensor 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01F-001/68
  • G01F-005/00
출원번호 US-0947889 (1992-09-18)
발명자 / 주소
  • Vavra Randall J. (Orange CA) Nguyen Lam T. (Garden Grove CA) Tran Erik Q. (Garden Grove CA)
출원인 / 주소
  • Unit Instruments, Inc. (Orange CA 02)
인용정보 피인용 횟수 : 43  인용 특허 : 0

초록

A vertical flow thermal mass flow sensor for a vertical flow thermal mass flow meter of a vertical flow thermal mass flow controller has a sensor tube having a gas inlet for receiving a gas to be metered. The sensor tube includes a first curved convection trap and a second curved convection trap for

대표청구항

A thermal mass flow sensor for use in a thermal mass flow meter having a bypass carrying a flow of gas in a bypass flow direction, comprising: a sensor tube having a gas inlet for receiving a sensor portion of the gas from the upstream bypass portion, said sensor tube having a first convection trap

이 특허를 인용한 특허 (43)

  1. Ambrosina, Jesse; Shajii, Ali, Apparatus and method for thermal dissipation in a thermal mass flow sensor.
  2. Ambrosina, Jesse; Suzuki, Isao, Apparatus and method for thermal isolation of thermal mass flow sensor.
  3. Ambrosina, Jesse; Suzuki, Isao; Shajii, Ali, Apparatus and method for thermal management of a mass flow controller.
  4. L'Bassi,Michael; Quaratiello,Mark J.; Bouley,Ronald H., Attitude error self-correction for thermal sensors of mass flow meters and controllers.
  5. Larson,Dwight S., Attitude insensitive flow device system and method.
  6. Ding,Junhua; L'Bassi,Michael; Zarkar,Kaveh H., Compensation for thermal siphoning in mass flow controllers.
  7. Moon Roger A., Component heater for use in semiconductor manufacturing equipment.
  8. van Putten,Maurituis H. P. M.; van Putten,Anton F. P.; van Putten,Michel J. A. M.; V Putten,Pascal F A M, Drift-free thermodynamic anemometry.
  9. Wang, Liming, Exhaust gas sensor.
  10. Bos,Jeroen Wouter; Hoitink,Ronald Wilhelmus Johannes; Besseling,Johannes Henricus; L��tters,Joost Conrad, Flow sensor of the thermal type.
  11. Inagaki, Hiroyuki; Warashina, Isamu, Flowmeter having a bent inlet passage for constant flow-velocity distribution.
  12. Zurek, Lawrence A.; Myers, Eric Christopher, Fluid flow meter having an improved sampling channel.
  13. Ritchart Thomas R., Fluid thermal mass flow sensor.
  14. Myers, Eric C.; Zurek, Lawrence A.; Caron, Richard W., Hot-wire mass flow sensor with low-loss bypass passage.
  15. Lukas Paul ; Gagnon Daniel F. ; Johnson Daniel ; Farrar Christopher D. ; Knight John D. ; Gillis John J., Line leak detection.
  16. Jarvie, Ian F., Line leak detector and method of using same.
  17. Jarvie, Ian F., Line leak detector and method of using same.
  18. Smirnov, Alexei V.; McDonald, R. Mike; Mauck, Justin, Mass flow controller having a first pair of thermal sensing elements opposing a second pair of thermal sensing elements.
  19. Arnold, Armin; Wiedemann, Juergen, Mass flow measuring or controlling device.
  20. Wang,Chiun; Redemann,Eric J, Mass flow meter or controller with inclination sensor.
  21. McMillan Robert D. ; McMillan Robert M., Mass flow sensor system for fast temperature sensing responses.
  22. McMillan Robert D. ; McMillan Robert M., Mass flow sensor system for fast temperature sensing responses.
  23. Zurek, Lawrence A.; Myers, Eric C., Mass fluid flow sensor having an improved housing design.
  24. Ike, Shinichi, Measuring apparatus and method of manufacturing the measuring apparatus.
  25. Lull, John Michael; Urdaneta, Nelson, Method and apparatus for balancing resistance.
  26. Zolock, Michael John; Ito, Hiroyuki, Method and apparatus for measuring the temperature of a gas in a mass flow controller.
  27. Tinsley,Kenneth E.; Tariq,Faisal, Method and system for a mass flow controller with reduced pressure sensitivity.
  28. McDonald, R. Mike, Method and system for operating a mass flow controller.
  29. Lull, John Michael; Wang, Chiun; Saggio, Jr., Joseph A., Methods and apparatus for pressure compensation in a mass flow controller.
  30. Lull,John Michael; Wang,Chiun; Saggio, Jr.,Joseph A., Methods and apparatus for pressure compensation in a mass flow controller.
  31. Lull,John Michael; Wang,Chiun; Saggio, Jr.,Joseph A., Methods and apparatus for pressure compensation in a mass flow controller.
  32. Lull,John Michael; Wang,Chiun; Saggio, Jr.,Joseph A., Methods and apparatus for pressure compensation in a mass flow controller.
  33. David P. Sheriff ; Chiun Wang, Pressure insensitive gas control system.
  34. Lull, John M.; Wang, Chiun; Valentine, William S.; Saggio, Jr., Joseph A., System and method for a mass flow controller.
  35. Lull,John M.; Wang,Chiun; Valentine,William S.; Saggio, Jr.,Joseph A., System and method for a mass flow controller.
  36. Lull,John M; Wang,Chiun; Valentine,William S; Saggio, Jr.,Joseph A, System and method for a mass flow controller.
  37. Lull,John M; Wang,Chiun; Valentine,William S; Saggio, Jr.,Joseph A, System and method for a mass flow controller.
  38. Hartman, Neil W.; Roberts, Colin A.; Mitchell, Marcus A., Systems and methods for detecting flow of a fluid.
  39. Lull, John Michael; Jhoty, Gawtam, Thermal flow meter.
  40. Doyle Michael J. ; LeMay Dan B. ; Vu Kim N., Thermal mass flow controller having orthogonal thermal mass flow sensor.
  41. Lull, John Michael, Variable resistance sensor with common reference leg.
  42. Lull,John Michael, Variable resistance sensor with common reference leg.
  43. Ding,Junhua; L'Bassi,Michael; Zarkar,Kaveh H., Vertical mount mass flow sensor.
섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로