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An ion source generating device having a main arc chamber and an auxiliary chamber attached to and in communication with the main chamber. The auxiliary chamber contains metal chips of barium, calcium or cerium to provide a reduction reaction of feed gas passing through the chamber and into the main

An ion source generating device having a main arc chamber and an auxiliary chamber attached to and in communication with the main chamber. The auxiliary chamber contains metal chips of barium, calcium or cerium to provide a reduction reaction of feed gas passing through the chamber and into the main chamber, in which ion beams are generated.

대표청구항 ▼

An ion source for producing an ion beam from a feed gas comprising: an arc chamber having an inlet orifice and an outlet orifice; an auxiliary chamber in fluid communication with said arc chamber; a feed gas input line into said auxiliary chamber; a filament for generating electrons in said arc cham

An ion source for producing an ion beam from a feed gas comprising: an arc chamber having an inlet orifice and an outlet orifice; an auxiliary chamber in fluid communication with said arc chamber; a feed gas input line into said auxiliary chamber; a filament for generating electrons in said arc chamber, together with a power source for heating and biasing said filament; and a metal chip reactant contained in said auxiliary chamber which provides a reduction reaction of the feed gas passing therethrough. A method of generating an ion beam from an arc chamber, comprising the steps of: attaching an auxiliary chamber to a wall of the arc chamber, with an orifice providing fluid communication therebetween; providing a reactant material of metal chips in said auxiliary chamber; heating said arc chamber up to a temperature of about 900°C. to about 1000°C. with an energizable electron emitting filament thereacross: passing a feed gas under pressure through said metal chips in said auxiliary chamber so as to form a stable solid fluoride compound therein; emitting an ion beam from an exit orifice in said heated arc chamber.