초록 ▼

A wafer storing, closed container for use in a clean room of a semiconductor manufacturing system is provided with an attached inert gas tank so as to eliminate the need to convey the container to an inert gas purge station to supplement the inert gas supply in the container due to leakage. A gas pa

A wafer storing, closed container for use in a clean room of a semiconductor manufacturing system is provided with an attached inert gas tank so as to eliminate the need to convey the container to an inert gas purge station to supplement the inert gas supply in the container due to leakage. A gas passageway is formed in a body of the container in such a manner that one end thereof is open inside the container. The other end is open outside the container. The portable inert gas tank is detachably connected to the other end of the gas passageway so as to automatically supplement the container with the inert gas.

대표청구항 ▼

1. A portable container adapted to store wafers in a clean room of a semiconductor manufacturing system comprising: a container body having an opening for accessing a storage area defined within said container; a lid member attached to said container body and adapted to extend across said openin

1. A portable container adapted to store wafers in a clean room of a semiconductor manufacturing system comprising: a container body having an opening for accessing a storage area defined within said container; a lid member attached to said container body and adapted to extend across said opening so as to close said container; a seal member positioned between said lid member and said container body such that, when said lid member is positioned so as to extend across said opening, said storage area is sealed; a passage having a first end opening into said storage area and a second end opening outside of said container; a tank connected to the second end of said passage and supported by said container body so as to be portable therewith, said tank containing a pressurized supply of inert gas; and means for regulating the pressure of inert gas in said storage area such that, when an item is placed in said storage area, said container is sealed and said storage area is filled with an initial supply of inert gas, a supplemental supply of inert gas will automatically be discharged into said storage area from said tank upon a predetermined decrease in inert gas pressure within said storage area due to leakage. 2. A portable container as claimed in claim 1, further including a filter located in said passage between said tank and the first end of said passage. 3. A portable container as claimed in claim 1, wherein said pressure regulating means includes a pressure control valve positioned between said tank and the first end of said passage. 4. A portable container as claimed in claim 3, wherein said tank includes a discharge nozzle and said pressure control valve comprises a check valve including a check valve member biased by a spring into sealing engagement with said discharge nozzle to prevent the discharge of inert gas from said tank until the differential pressure between said tank and said storage area falls below a predetermined amount.