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특허 상세정보

Method and apparatus for predicting end-of-life of a consumable in a fluid purification system

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B01D-053/04   
미국특허분류(USC) 95/25 ; 95/90 ; 96/108 ; 55/270
출원번호 US-0025376 (1993-02-26)
발명자 / 주소
출원인 / 주소
인용정보 피인용 횟수 : 11  인용 특허 : 0
초록

A method for predicting end-of-life of a system consumable in a fluid purification system characterized by the steps of (a) coupling a model consumable to the fluid purification system which has comparable characteristics but substantially less time capacity than the system consumable; (b) diverting a portion of an unpurified fluid which could otherwise flow into the system consumable into the model consumable; and (c) analyzing the model consumable to predict the end-of-life of the system consumable. Preferably, the time capacity of the model consumable...

대표
청구항

A method for predicting the end-of-life of a system consumable in a system for purifying an unpurified fluid, the method comprising the steps of: coupling a model consumable to a fluid purification system which has comparable characteristics but substantially less capacity than a system consumable in said fluid purification system; diverting a portion of the unpurified fluid which could otherwise flow into said system consumable into said model consumable, the mass flow rate of the diverted portion being controlled by a mass flow controller; and analyzin...

이 특허를 인용한 특허 피인용횟수: 11

  1. Hagiwara Shigeru (Kawasaki JPX) Tokuda Noriaki (Kawasaki JPX). Air cleaning apparatus used for an exposure apparatus. USP1997115685895.
  2. Ding, Yuqing; Shrewsbury, Mark; Friday, David K.. Filter integrity tester. USP2009097592178.
  3. Spiegelman, Jeffrey J.; Abber, Russell L.. Gas purification system and method. USP2003026514313.
  4. Borkman, James Donald; Malczewski, Mark L.. Life prediction for gas purifiers. USP2005056889144.
  5. Maxwell Allan L.. Method and apparatus for controlling the cleaning cycle of air filter elements and for predicting the useful life there. USP1998015711785.
  6. Motouji, Satoshi; Hirao, Iichi; Hayashi, Teruyuki; Saito, Misako. Method for deciding on the timing of replacing a chemical filter, filter life detection sensor, chemical filter unit, and semiconductor manufacturing apparatus. USP2003036537347.
  7. Schaeffer, Jeremy; Peterson, Jesse; Vestal, William; Al-Yafawi, Abdullah. On-board inert gas generating system prognostic health monitoring. USP20190110179308.
  8. Billingham, John Fredric; Mahl, Jerry Michael. Process and system for purifying gases. USP2012018105534.
  9. Choi, Chul-Hwan; Jeon, Jin-Ho; Kim, Yong-Gab; Yi, Jong-Seung; Lee, Min-Woo; Kim, Kyung-Tae; Cho, Chan-Hyung. Residual gas removing device and method thereof. USP2005026858062.
  10. Custer,John P.; Kessler,Kenneth L.; Harel,Reuben; Creed,John L.. Residual life indicating system. USP2007047201036.
  11. Succi Marco,ITX ; Vergani Giorgio,ITX ; Lorimer D'Arcy H.. Safety system for gas purifier. USP2001016168645.