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[미국특허] Positioning device for planar positioning 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H02K-041/00
출원번호 US-0995589 (1992-12-22)
발명자 / 주소
  • Chitayat Anwar (Northport NY)
출원인 / 주소
  • Anorad Corporation (Northport NY 02)
인용정보 피인용 횟수 : 57  인용 특허 : 0

초록 ▼

A positioning device has a shuttle slidably and rotatably supported above a base assembly. A first linear motor moves the shuttle linearly in a first direction while the second and third linear motors move the shuttle linearly in a second direction, normal to the first direction. The second and thir

대표청구항 ▼

A positioning device comprising: a shuttle; a base assembly having a planar surface; means for slidably supporting said shuttle in a plane above said planar surface of said base assembly; said means for slidably supporting including means for permitting said shuttle to slide in any direction in said

이 특허를 인용한 특허 (57) 인용/피인용 타임라인 분석

  1. Nesch,Ivan N.; Morrison,Timothy I., Apparatus and method for precise angular positioning.
    상세보기
  2. Susumu Makinouchi JP, Apparatus including a motor-driven stage for exposing a photosensitive substrate, and method of making such apparatus.
    상세보기
  3. Hosek, Martin; Moura, Jairo Terra; Hofmeister, Christopher, Commutation of an electromagnetic propulsion and guidance system.
    상세보기
  4. Hazelton Andrew J., Compact planar motor having multiple degrees of freedom.
    상세보기
  5. Hol,Sven Antoin Johan; Compter,Johan Cornelis; Loopstra,Erik Roelof; Vreugdewater,Patricia, Displacement apparatus, litographic apparatus, device manufacturing method, and device manufactured thereby.
    상세보기
  6. Frissen, Petrus C.M.; Compter, Johan C.; Peijnenburg, Antonius T.A.; Loopstra, Erik R., Displacement device.
    상세보기
  7. Lu, Xiaodong, Displacement devices and methods and apparatus for detecting and estimating motion associated with same.
    상세보기
  8. Lu, Xiaodong, Displacement devices and methods for fabrication, use and control of same.
    상세보기
  9. Lu, Xiaodong; Usman, Irfan-Ur-Rab, Displacement devices and methods for fabrication, use and control of same.
    상세보기
  10. Lu, Xiaodong; Usman, Irfan-Ur-Rab, Displacement devices and methods for fabrication, use and control of same.
    상세보기
  11. Lu, Xiaodong; Usman, Irfan-Ur-Rab, Displacement devices and methods for fabrication, use and control of same.
    상세보기
  12. Hazelton Andrew J. ; Binnard Michael B. ; Gery Jean-Marc, Electric motors and positioning devices having moving magnet arrays and six degrees of freedom.
    상세보기
  13. Tanaka Keiichi,JPX, Electromagnetic motor.
    상세보기
  14. Tanaka, Keiichi, Flat motor device and its driving method, stage device and its driving method, exposure apparatus and exposure method, and device and its manufacturing method.
    상세보기
  15. Trammell, Glenn Sterling, Gas bearing system.
    상세보기
  16. Lehr,Heinz; Schrader,Stephan; Walter,Steffen, Gliding field linear motor.
    상세보기
  17. Cahill Steven P. ; Hunter Bradley L., High-speed precision positioning apparatus.
    상세보기
  18. Cahill, Steven P.; Hunter, Bradley L., High-speed precision positioning apparatus.
    상세보기
  19. Cahill, Steven P.; Hunter, Bradley L., High-speed precision positioning apparatus.
    상세보기
  20. Trammell, Glenn S., Linear drive motor with improved bearing system.
    상세보기
  21. Bader Jurgen,DEX, Linearly displaceable precision table.
    상세보기
  22. Maudal Inge (604 Lassen La. Costa Mesa CA 92626-3122), Low stiction, dual drive, motive system.
    상세보기
  23. Suderman, Donald A., Magnetic roll.
    상세보기
  24. David A. Markle, Magnetically positioned X-Y stage having six degrees of freedom.
    상세보기
  25. Markle David A., Magnetically positioned X-Y stage having six degrees of freedom.
    상세보기
  26. Markle David A., Magnetically-positioned X-Y stage having six-degrees of freedom.
    상세보기
  27. Kidd, Matthew Donald; Weston, Nicholas John; Henshaw, James Reynolds; Ardron, Marcus; Dardis, John; Thomson, Robert, Measurement scale with periodic nanostructure.
    상세보기
  28. Kidd, Matthew Donald; Weston, Nicholas John; Henshaw, James Reynolds; Ardron, Marcus; Dardis, John; Thomson, Robert, Measurement scale with periodic nanostructure.
    상세보기
  29. Phillips, Alton H., Method and apparatus for aligning mirror blocks of a multi-element mirror assembly.
    상세보기
  30. Chitayat Anwar, Method for manufacturing a two axis motor with high density magnetic platen.
    상세보기
  31. Trammell, Glenn S.; Qiao, Rui, Method of forming a secondary for linear drive motor comprising sheet of highly permeable magnetic material having synchronized motor teeth, encoder teeth, and commutation tracks integrally formed therein.
    상세보기
  32. Lu, Xiaodong, Methods and systems for controllably moving multiple moveable stages in a displacement device.
    상세보기
  33. Moura, Jairo; Krishnasamy, Jay; Hosek, Martin, Motor stator with lift capability and reduced cogging characteristics.
    상세보기
  34. Hosek, Martin; Hofmeister, Christopher; Zettler, John F.; Krupyshev, Alexander; Syssoev, Sergei; Majczak, Krzystof, Multiple dimension position sensor.
    상세보기
  35. Kou, Baoquan; Xie, Dagang; Zhang, Lu; Zhang, He, Permanent magnet synchronous planar motor with structure of concentric winding.
    상세보기
  36. Hazelton Andrew J., Planar electric motor with dual coil and magnet arrays.
    상세보기
  37. Michael Binnard, Planar motor with linear coil arrays.
    상세보기
  38. Michael Binnard, Planar motor with linear coil arrays.
    상세보기
  39. Takita Mark K. ; Novak W. Thomas ; Hazelton Andrew J., Platform positionable in at least three degrees of freedom by interaction with coils.
    상세보기
  40. Makinouchi, Susumu, Position measuring system and position measuring method, Movable body apparatus, movable body drive method, exposure apparatus and exposure method, pattern forming apparatus, and device manufacturing method.
    상세보기
  41. Trammell, Glenn S., Primary for linear drive motor with solid steel stacks.
    상세보기
  42. Hazelton Andrew J. ; Tanaka Keiichi,JPX ; Hayashi Yutaka,JPX ; Ito Nobukazu,JPX, Reaction force isolation system for a planar motor.
    상세보기
  43. Hosek, Martin; Moura, Jairo Terra; Hofmeister, Christopher, Reduced-complexity self-bearing brushless DC motor.
    상세보기
  44. Gilchrist, Ulysses; Hosek, Martin; Moura, Jairo Terra; Krishnasamy, Jay; Hofmeister, Christopher, Robot drive with magnetic spindle bearings.
    상세보기
  45. Gilchrist, Ulysses; Hosek, Martin; Moura, Jairo Terra; Krishnasamy, Jay; Hofmeister, Christopher, Robot drive with magnetic spindle bearings.
    상세보기
  46. Chitayat Anwar, Rotary-linear actuator.
    상세보기
  47. Chitayat Anwar, Rotary-linear actuator.
    상세보기
  48. Trammell, Glenn S.; Qiao, Rui, Secondary for linear drive motor comprising sheet of highly permeable magnetic material having synchronized motor teeth, encoder teeth, and commutation tracks integrally formed therein.
    상세보기
  49. Roy, Shambhu N., Single motor, multi-axis stage.
    상세보기
  50. Im, James S., Single-shot semiconductor processing system and method having various irradiation patterns.
    상세보기
  51. Im, James S., Single-shot semiconductor processing system and method having various irradiation patterns.
    상세보기
  52. Im, James S., Single-shot semiconductor processing system and method having various irradiation patterns.
    상세보기
  53. Krupyshev, Alexander G.; Hofmeister, Christopher, Substrate processing apparatus with motors integral to chamber walls.
    상세보기
  54. Chitayat,Anwar; Faizullabhoy,Mustansir, System and method to control a rotary-linear actuator.
    상세보기
  55. Chitayat Anwar, Two-axis motor platen and method for making.
    상세보기
  56. Hazelton, Andrew J.; Novak, W. Thomas; Ebihara, Akimitsu, Wafer positioner with planar motor and mag-lev fine stage.
    상세보기
  57. Hazelton Andrew J. ; Gery Jean-Marc, Wedge and transverse magnet arrays.
    상세보기

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