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Comb drive micromechanical tuning fork gyro 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01P-009/04
출원번호 US-0870414 (1992-04-07)
발명자 / 주소
  • Bernstein Jonathan J. (Medfield MA) Weinberg Marc S. (Needham MA)
출원인 / 주소
  • The Charles Stark Draper Laboratory, Inc. (Cambridge MA 02)
인용정보 피인용 횟수 : 152  인용 특허 : 0

초록 ▼

A microfabricated tuning fork rate sensitive structure and drive electronics in which vibrational forces are communicated through a set of meshing drive and driven finger electrodes associated with each of two vibrating elements. The vibrating elements are supported in a rotatable assembly between f

대표청구항 ▼

An inertial rate sensor comprising: a first weighted element suspended to rotate about a first axis and adapted to vibrate in a direction substantially orthogonal to said first axis; a set of driven electrodes projecting from said suspended element in the direction of vibration; a set of drive elect

이 특허를 인용한 특허 (152)

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