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Application of microsubstrates for materials processing 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-016/00
출원번호 US-0965943 (1992-10-26)
발명자 / 주소
  • Cavicchi Richard (Washington Grove MD) Semancik Stephen (Mt. Airy MD) Suehle John S. (Westminster MD) Gaitan Michael (Gaithersburg MD)
출원인 / 주소
  • The United States of America as represented by the Secretary of Commerce (Washington DC 06)
인용정보 피인용 횟수 : 109  인용 특허 : 0

초록 ▼

Arrays of microfabricated hotplates have been used as substrate arrays for materials processing on a microscopic scale. Properties of individual elements (pixels) of the array, such as temperature and voltage bias, are controlled by addressing a given pixel with appropriate signals. Materials are de

대표청구항 ▼

A method of preparing a plurality of micro-samples of materials for investigation which comprises: providing a substrate having a plurality of micro-hotplates, wherein each of said plurality of micro-hotplates can be individually temperature controlled; and depositing a material film on said plurali

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