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Methods for fabrication of thin film inductors, inductor networks and integration with other passive and active devices 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B44C-001/22
  • C23F-001/00
  • C03C-015/00
출원번호 US-0107246 (1993-08-16)
발명자 / 주소
  • Desaigoudar Chan M. (Los Gatos CA) Gupta Suren (San Jose CA)
출원인 / 주소
  • California Micro Devices (Milpitas CA 02)
인용정보 피인용 횟수 : 95  인용 특허 : 0

초록 ▼

The fabrication of thin film inductors on a substrate, which may include thin film resistors, thin film capacitors, and semiconductor devices. In one embodiment an inductor is fabricated initially on a substrate and then integrated with other devices subsequently formed on the substrate. In this emb

대표청구항 ▼

A method for fabricating an electronic device comprising the steps of: utilizing a substrate having a first and a second surface; forming a first conductive layer above said first surface of said substrate; forming a patterned dielectric layer above said first conductive layer; and forming a pattern

이 특허를 인용한 특허 (95)

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